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type="text/css"></style> <div id="ct" class="ct2 wp cl"> <div class="mn"> <div class="bm_haa cl"> <div class="bm_h cl"> <a href="http://www.oecr.com/portal.php?mod=rss&catid=62" class="y xi2 rss" target="_blank" title="RSS">订阅</a><h1 class="xs2">文章</h1> </div></div> <div class="kjkjb"> <div class="bm vw" style="margin-bottom:0;"> <div class="h hm"> <div class="zxtoux"><img src="http://www.oecr.com/uc_server/avatar.php?uid=54876&size=small" /></div> <h1 class="ph">光学薄膜应力的分类 </h1> <p class="xg1"> 时间：2021-11-9 09:08<a class="zz" href="home.php?mod=space&uid=54876">作者：update</a> 阅读<em id="_viewnum">(1860)</em> 评论: <a href="http://www.oecr.com/portal.php?mod=comment&id=9341&idtype=aid" title="查看全部评论"><em id="_commentnum">5</em></a>来自: 网络平台</p> <div class="zxfb" ><a href="http://www.oecr.com/portal.php?mod=rss&catid=62" class="y xi2 rss" target="_blank" title="RSS">订阅</a></div> </div> <!--[diy=diysummarytop]--><div id="diysummarytop" class="area"></div><!--[/diy]--> <div class="s"> <div class="ss"><div><span>导读： </span>薄膜应力按作用方向的不同，被划分为负值的压应力和正值的张应力，当薄膜相对于基底膨胀时，则处于压应力状态，而当薄膜相对于基底收缩时，则处于张应力状态。</div> </div> <!--[diy=diysummarybottom]--><div id="diysummarybottom" class="area"></div><!--[/diy]--> <div class="d"> <!--[diy=diycontenttop]--><div id="diycontenttop" class="area"></div><!--[/diy]--> <table cellpadding="0" cellspacing="0" class="vwtb"><tr><td id="article_content"><div> <a href="http://opticalfilm.oecr.com" target="_blank" class="relatedlink">薄膜</a>应力按作用方向的不同，被划分为负值的压应力和正值的张应力，当薄膜相对于基底膨胀时，则处于压应力状态，而当薄膜相对于基底收缩时，则处于张应力状态。</div><div><br></div><div> 薄膜的残余应力由热应力和内应力组成，热应力与内应力的形成机理如下所述。</div><div><br></div><div> 大多数薄膜在高于大气环境温度的真空环境中制备完成，在逐渐冷却至室温的过程中，由于薄膜与基底、薄膜与薄膜之间的热膨胀系数不同，使得薄<a href="http://opticalfilm.oecr.com" target="_blank" class="relatedlink">膜系</a>统中各部分之间的膨胀程度有所不同，这种由温度变化引起的薄膜系统中各部分之间的膨胀差异称为热应变，从而产生了热应力。薄膜内应力的形成机理的复杂程度远大于热应力。</div><div><br></div><div> 薄膜内应力的形成、作用方向和作用方向的变化与薄膜的制备方式和<a href="http://optics.oecr.com" target="_blank" class="relatedlink">工艺</a>条件息息相关，不同的制备方式和工艺条件会作用在薄膜生长过程中，通过影响薄膜中的晶粒、晶界、杂质、空位和表面应力等因素来改变薄膜的结构，薄膜内应力的形成是多种机制综合作用的结果。</div><div><br></div><div><div 0px;"="" 255);"="" 255,="" rgb(255,="" simsun;="" yahei",="" microsoft="" style="overflow-wrap: normal; background-color: rgb(255, 255, 255); color: rgb(143, 143, 143); text-indent: 28px; font-family: 微软雅黑;"><span style="overflow-wrap: normal;">免责声明：编写或转载此文是为了传递更多的信息，为光电行业尽一些绵薄之力。若文字或图片侵犯了您的合法权益或有不当之处，请作者在20个工作日之内与我们联系，我们将协调给予处理。</span></div><div 0px;"="" 255);"="" 255,="" rgb(255,="" simsun;="" yahei",="" microsoft="" start;"="" normal;="" 400;="" 14px;="" style="overflow-wrap: normal; background-color: rgb(255, 255, 255); color: rgb(143, 143, 143); text-indent: 28px; font-family: 微软雅黑;"><br style="overflow-wrap: normal;"></div><div 0px;"="" 255);"="" 255,="" rgb(255,="" simsun;="" yahei",="" microsoft="" start;"="" normal;="" 400;="" 14px;="" style="overflow-wrap: normal; background-color: rgb(255, 255, 255); color: rgb(143, 143, 143); 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