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type="text/css"></style> <div id="ct" class="ct2 wp cl"> <div class="mn"> <div class="bm_haa cl"> <div class="bm_h cl"> <a href="http://www.oecr.com/portal.php?mod=rss&catid=57" class="y xi2 rss" target="_blank" title="RSS">订阅</a><h1 class="xs2">文章</h1> </div></div> <div class="kjkjb"> <div class="bm vw" style="margin-bottom:0;"> <div class="h hm"> <div class="zxtoux"><img src="http://www.oecr.com/uc_server/avatar.php?uid=54876&size=small" /></div> <h1 class="ph">台积电举行技术研讨会的会前说明会，介绍28nm工艺的开发状况等 </h1> <p class="xg1"> 时间：2010-7-14 01:49<a class="zz" href="home.php?mod=space&uid=54876">作者：update</a> 阅读<em id="_viewnum">(1058)</em> 评论: 0</p> <div class="zxfb" ><a href="http://www.oecr.com/portal.php?mod=rss&catid=57" class="y xi2 rss" target="_blank" title="RSS">订阅</a></div> </div> <!--[diy=diysummarytop]--><div id="diysummarytop" class="area"></div><!--[/diy]--> <div class="s"> <div class="ss"><div><span>导读： </span>台湾台积电（TSMC）7月1日面向新闻媒体进行了“TSMC 2010 Japan Technology Symposium”(7月2日举办)的会前说明会，台积电研发副总裁兼首席技术官Jack Sun和台积电日本代表董事社长小野寺诚，在说明会上介绍了技术开 ...</div> </div> <!--[diy=diysummarybottom]--><div id="diysummarybottom" class="area"></div><!--[/diy]--> <div class="d"> <!--[diy=diycontenttop]--><div id="diycontenttop" class="area"></div><!--[/diy]--> <table cellpadding="0" cellspacing="0" class="vwtb"><tr><td id="article_content">台湾台积电（TSMC）7月1日面向新闻媒体进行了“TSMC 2010 Japan Technology Symposium”(7月2日举办)的会前说明会，台积电研发副总裁兼首席技术官Jack Sun和台积电日本代表董事社长小野寺诚，在说明会上介绍了技术开发状况和业务状况。其中，Jack Sun介绍的技术开发状况与该公司在2010年2月24日举行的“TSMC 2010 Executive Forum on Leading Edge Technology”的内容相比没有太大变化（参阅本站报道）。不过，关于20nm曝光技术方面，Jack Sun表示“EUV（extreme ultraviolet）曝光和多<a href="http://electronic.oecr.com" target="_blank" class="relatedlink">电子</a>束直写（MEBDW）都可以，我们需要可以满足成本和处理能力要求的技术”，由此可以看出台积电强烈期待曝光技术能较现状取得大的进展。 <BR><BR>关于<a href="http://optics.oecr.com" target="_blank" class="relatedlink">工艺</a>技术的开发状况方面，已经开始试验性生产采用SiON栅极绝缘膜的28nm低功耗版工艺（28LP）。关于采用HKMG（组合使用高介电率栅极绝缘膜和金属栅极）的三项工艺（28HP，28HPL，28HPM）方面，正在推进试验性生产的准备工作。28HP、28HPL以及28HPM分别预定在2010年第四季度、2011年第一季度以及2011年第四季度开始验性生产。另外，20nm工艺也正在进行开发，目的是在2012年第四季度开始生产高性能版的“20G”，在2013年第二季度开始生产低功耗版的“20SoC”。 <BR><BR>在曝光技术方面，台积电展示了同时记载有20nm工艺用MEBDW（用于接触孔和通孔，处理能力为100张/小时）、EUV曝光（开口数（NA）为0.25）以及组合使用超解像技术和布局技术的ArF液浸曝光（NA1.35）的三种技术的图案。其中，在MEBDW和EUV曝光方面展示了最新成果。例如，在MEBDW方面展示了采用光束为110、加速电压为5KeV的Preα机，对半间距为30nm的接触孔进行曝光的成果，今后为了实现10张/小时和100张/小时的处理能力，计划扩展到1万3000光束并推进实现集群工具（Cluster Tool）化，以支持20nm和14nm。 <BR><BR>另外在EUV方面，台积电展示了对20nm的第一层金属布线和14nm的接触层进行EUV曝光的成果，同时还表示预定在2011年早些时候导入“NXE：3100”。不过，Jack Sun指出，“课题均是成本和处理能力”。对于记者提出的“从目前来看，您认为哪一种技术更有前途”这一问题，Jack Sun未作出明确回答，让人觉得他对上述的技术都还很不满意。（日经BP社 记者：长广 恭明）</td></tr></table> <!--[diy=diycontentbottom]--><div id="diycontentbottom" class="area"></div><!--[/diy]--> <script src="data/cache/home.js?eOg" type="text/javascript"></script> <div id="click_div"><table cellpadding="0" cellspacing="0" 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