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type="text/css"></style> <div id="ct" class="ct2 wp cl"> <div class="mn"> <div class="bm_haa cl"> <div class="bm_h cl"> <a href="http://www.oecr.com/portal.php?mod=rss&catid=62" class="y xi2 rss" target="_blank" title="RSS">订阅</a><h1 class="xs2">文章</h1> </div></div> <div class="kjkjb"> <div class="bm vw" style="margin-bottom:0;"> <div class="h hm"> <div class="zxtoux"><img src="http://www.oecr.com/uc_server/avatar.php?uid=54876&size=small" /></div> <h1 class="ph">SPDT加工CaF2粗糙度控制和激光辅助应用 </h1> <p class="xg1"> 时间：2020-8-6 10:35<a class="zz" href="home.php?mod=space&uid=54876">作者：update</a> 阅读<em id="_viewnum">(1021)</em> 评论: <a href="http://www.oecr.com/portal.php?mod=comment&id=8609&idtype=aid" title="查看全部评论"><em id="_commentnum">5</em></a>来自: 网络平台</p> <div class="zxfb" ><a href="http://www.oecr.com/portal.php?mod=rss&catid=62" class="y xi2 rss" target="_blank" title="RSS">订阅</a></div> </div> <!--[diy=diysummarytop]--><div id="diysummarytop" class="area"></div><!--[/diy]--> <div class="s"> <div class="ss"><div><span>导读： </span>在实际SPDT(单点金刚石切削)加工脆性光学材料中，其影响表面粗糙度的各种因素可以归纳为5大方面：工件材料性质，金刚石刀具，加工工艺参数，机床设备，环境。我们以加工CaF2为例，按照5大方向，分享如何运用SPDT去控 ...</div> </div> <!--[diy=diysummarybottom]--><div id="diysummarybottom" class="area"></div><!--[/diy]--> <div class="d"> <!--[diy=diycontenttop]--><div id="diycontenttop" class="area"></div><!--[/diy]--> <table cellpadding="0" cellspacing="0" class="vwtb"><tr><td id="article_content"><div> 在实际SPDT(单点金刚石切削)<a href="http://optics.oecr.com" target="_blank" class="relatedlink">加工</a>脆性光学<a href="http://material.oecr.com" target="_blank" class="relatedlink">材料</a>中，其影响表面粗糙度的各种因素可以归纳为5大方面：工件材料性质，金刚石刀具，加工<a href="http://optics.oecr.com" target="_blank" class="relatedlink">工艺</a>参数，机床设备，环境。我们以加工CaF2为例，按照5大方向，分享如何运用SPDT去控制好粗造度要求。并给大家展示运用Micro-LamSystem和M10刀具辅助加工出的最终效果。</div><div><br></div><div><p style="text-align: center;"><a href="data/attachment/portal/202008/06/103138wcz6czouiccu56oz.png" target="_blank"><img src="data/attachment/portal/202008/06/103138wcz6czouiccu56oz.png"></a></p></div><div><br></div><div> 一.CaF2<a href="http://material.oecr.com" target="_blank" class="relatedlink">晶体</a>材料分析</div><div><br></div><div> CaF2晶体是典型的荧石型立方结构，其<a href="http://theory.oecr.com" target="_blank" class="relatedlink">物理</a>性质密切影响它的生长与加工，通过对比CaF2晶体与Si晶体的基本物理性质可知，CaF2晶体硬度小，热膨胀系数高而热导率低，所以较小的温差就会引起变形，这使得其表面抛光非常困难，容易残留抛光痕，或者嵌入杂质，而且在加工过程中需要不断的热处理来避免边缘碎裂和整体断裂。CaF2晶体这些物理性质是在加工过程中考虑的重要因素。</div><div><br></div><div><p style="text-align: center;"><a href="data/attachment/portal/202008/06/103152fpkmqhsduuquekuu.png" target="_blank"><img src="data/attachment/portal/202008/06/103152fpkmqhsduuquekuu.png"></a></p></div><div><br></div><div> 二．金刚石刀具的选择</div><div><br></div><div> 金刚石刀具的表面形貌会影响加工工件的表面粗造度，其中最主要的影响是刀刃的状况，包括前刀面，后刀面和刀刃边缘的状况。由于SPDT加工遵循“复印”原理，刀刃的表面精度将直接复印到加工工件的表面上，因而要获得较好的表面粗糙度，刀刃的加工精度越高越好。</div><div><br></div><div> 状态良好的刀具刀刃波纹度达到<a href="http://material.oecr.com" target="_blank" class="relatedlink">纳米</a>量级，天然金刚石刀具可以加工达到非常锋锐，其刃口半径一般可以达到100nm，有的甚至可以达到10-30nm。一般而言刀具的刀刃波纹度和刃口半径越小，可以获得更好的加工表面粗糙度精度。</div><div><br></div><div> 刀具的前角是另一个重要因素，对脆性材料的切屑，表面形貌的形成有重要影响，和切削硬脆性材料时刀具的磨损也密切相关。通过有限元建模和实验等方法，结论一般认为切削加工脆性光学性材料时，使用负角度前角的金刚石刀具可以获得表面粗糙度较好的加工表面。实验切削硅，锗晶体材料时，发现使用-25°前刀角的刀具表面粗糙度最小，切削CaF2晶体材料使用-25°前刀角刀具，加工表面质量较好。</div><div><br></div><div> 加工过程中刀具会形成磨损，尤其加工硅等硬度较大的脆性材料时，由于刀具磨损将直接劣化工件的表面粗糙度，因而研究如何刀具磨损减小，使刀具的使用寿命增长，将有利于在SPDT加工中控制表面粗糙度。</div><div><br></div><div> 三．SPDT加工工艺参数</div><div><br></div><div> 在加工过程中控制加工表面质量的条件主要包括加工工艺参数和切削液的使用。加工工艺参数包括进给量，主轴转速，切削深度，其中进给量等于进给速度率除以主轴转速。</div><div><br></div><div> <a href="http://theory.oecr.com" target="_blank" class="relatedlink">理论</a>上，切削参数与表面粗糙度有以下公式：</div><div style="text-align: center;"><br></div><div><p style="text-align: center;"><a href="data/attachment/portal/202008/06/103223dze9jjw9n6zd6jn0.png" target="_blank"><img src="data/attachment/portal/202008/06/103223dze9jjw9n6zd6jn0.png"></a></p></div><div><br></div><div> Sa是表面粗糙度的算术平均值，R为刀具半径，V为主轴转速，f为进给率，F为进给量。实验研究指出：进给量对表面粗糙度影响较为显著，表面粗糙度随着进给量变小而变小，</div><div><br></div><div> 当进给量小于一定值，表面粗糙度在小范围波动，并非进给量越小表面粗糙度越小；切削深度对表面粗糙度有重要影响，只有当切削深度小于一定值时，在圆弧刃切削模型下使切削厚度小于脆性材料的临界切削厚度，才能在表面实现完全的塑性切削，生成光滑表面。</div><div><br></div><div> 切削加工CaF2晶体工件，口径为50mm，加工面型为平面。运用国外超精密数控SPDT</div><div><br></div><div> 机床和白光干涉仪进行加工和采样，整理数据如下。</div><div><p style="text-align: center;"><a href="data/attachment/portal/202008/06/103243frq282or8fg11gq2.png" target="_blank"><img src="data/attachment/portal/202008/06/103243frq282or8fg11gq2.png"></a></p></div><div><p style="text-align: center;"><a href="data/attachment/portal/202008/06/103243o9zwy7ggyyddytog.png" target="_blank"><img src="data/attachment/portal/202008/06/103243o9zwy7ggyyddytog.png"></a></p></div><div><br></div><div> 采用快速的优化参数，选择主轴转速为2000rev，切削深度为3um，进给量为2um/rev，对CaF2晶体获得表面粗糙度Sq为3.68nm，Sa为3.33nm。</div><div><br></div><div> 四．超精密数控机床设备</div><div><br></div><div> 超精密加工机床时SPDT加工工艺的关键技术。SPDT加工元件的型面精度，表面粗糙度精度能否达到纳米级精度，很大程度上取决于与机床这一因素，机床导轨，主轴和伺服机构，机身结构，减振等系统的精度限制着加工表面的面型精度和表面粗糙度。</div><div><br></div><div> 五．超精密加工环境</div><div><br></div><div> 超精密加工环境主要指恒温，隔振和超净化三个方面。</div><div><br></div><div> 切削温度的变化也必然会引起刀具和工件材料性质改变，导致切削力的动态变化并产生<a href="http://machine.oecr.com" target="_blank" class="relatedlink">机械</a>热颤振影响表面粗糙度的微观特征。车间温度一般控制在20°C±0.5°C，而切削部件在恒温液的喷淋下最高控制范围在20°C±0.05°C.</div><div><br></div><div> 车间应远离火车，地铁和重工业厂区，SPDT车床内部有动态<a href="http://sensor.oecr.com" target="_blank" class="relatedlink">传感</a>器，用于对旋转部件的动平衡进行控制，有效减少主轴，导轨的颤动，一般可以控制到纳米量级。</div><div><br></div><div> 超精密加工还必须有净化的环境，一般要求控制在10000级洁净水平。</div><div><br></div><div> <a href="http://laser.oecr.com" target="_blank" class="relatedlink">激光</a>辅助</div><div><br></div><div> SPDT加工脆性光学材料中，其影响表面粗糙度的各种因素，需要大量的实验<a href="http://opticaltest.oecr.com" target="_blank" class="relatedlink">测试</a>数据经验做支撑，如何短期内让光学<a href="http://b.oecr.com/company" target="_blank" class="relatedlink">企业</a>材料加工水平上升一个台阶，现在已有了单点金刚石切削激光辅助。</div><div><br></div><div> 微激光辅助精密切削是利用激<a href="http://solar.oecr.com" target="_blank" class="relatedlink">光热</a>软化工件表面，改善材料的局部切削性能，可显著加大材料脆塑转变临界深度，降低工件表面粗造度，改善工件表面质量，同时降低刀具磨损，减小切削力。此加工工艺适用于红外晶体，硬质合金，不锈钢，玻璃等材料超精密加工。</div><div><br></div><div> 美国Micro-Lam公司在此领域扎根多年，潜心研发出激光辅助精密切削<a href="http://b.oecr.com/sell" target="_blank" class="relatedlink">产品</a>（Micro-LamSystem），拥有多项技术专利和大量实际产品加工工艺库，并选定优质金刚石刀具供应商M10作为产品指定刀具合作商，为客户提供定制化精密加工解决方案。</div><div><br></div><div> 光研作为Micro-lam，M10客户，对其激光辅助精密切削产品及工艺充满信心并正式与Micro-lam，M10公司合作，全面代理其产品。并组建专业的刀具修复团队运用原厂提供的设备支持M10刀具快速，高质量修复。修复后的刀具可达到出厂级别且交付快速。</div><div style="text-align: center;"><br></div><div><p style="text-align: center;"><a href="data/attachment/portal/202008/06/103351ro27oddb5kfglfox.png" target="_blank"><img src="data/attachment/portal/202008/06/103351ro27oddb5kfglfox.png"></a><a href="data/attachment/portal/202008/06/103351tzshglszu42fw21u.png" target="_blank"><img src="data/attachment/portal/202008/06/103351tzshglszu42fw21u.png"></a></p><p style="text-align: center;"><a href="data/attachment/portal/202008/06/103351h6pprdkozlkonfrc.png" target="_blank"><img src="data/attachment/portal/202008/06/103351h6pprdkozlkonfrc.png"></a></p></div><div><br></div><div> 氟化钙材料运用Micro-LamSystem激光辅助和M10刀具加工效果</div><div><br></div><div><p style="text-align: center;"><a href="data/attachment/portal/202008/06/103350ixgrxxg6gbv9ozjz.png" target="_blank"><img src="data/attachment/portal/202008/06/103350ixgrxxg6gbv9ozjz.png"></a></p></div><div><br></div><div> 工艺参数表（请来电咨询）</div><div><br></div><div><p style="text-align: center;"><a href="data/attachment/portal/202008/06/103509tnz4rkvmppt1e1xe.png" target="_blank"><img src="data/attachment/portal/202008/06/103509tnz4rkvmppt1e1xe.png.thumb.jpg"></a></p></div><div><br></div><div> 咨询方式：</div><div><br></div><div> 丁经理电话：13382782332</div><div><br></div><div><p microsoft="" yahei",="" simsun;="" background-color:="" rgb(255,="" 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href="http://club.oecr.com/space-uid-101142.html" class="xi2 xw1" c="1">chinfa</a> <span class="xg1 xw0">2020-8-6 13:26</span> </dt> <dd>顶起出售广告位</dd> </dl><a name="comment_anchor_27366"></a> <dl id="comment_27366_li" class="ptm pbm bbda cl"> <dt class="mbm"> <span class="y xw0 xi2"> <a href="javascript:;" onclick="portal_comment_requote(27366, '8609');">引用</a> </span> <a href="http://club.oecr.com/space-uid-86596.html" class="xi2 xw1" c="1">jylu666</a> <span class="xg1 xw0">2020-8-6 11:26</span> </dt> <dd>我喜欢物理</dd> </dl><a name="comment_anchor_27365"></a> <dl id="comment_27365_li" class="ptm pbm bbda cl"> <dt class="mbm"> <span class="y xw0 xi2"> <a href="javascript:;" onclick="portal_comment_requote(27365, '8609');">引用</a> </span> <a href="http://club.oecr.com/space-uid-125418.html" class="xi2 xw1" c="1">peng888</a> <span class="xg1 xw0">2020-8-6 10:55</span> </dt> <dd>这个很有用处。</dd> </dl></div> </div> <!--[diy=diycontentcomment]--><div id="diycontentcomment" 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