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type="text/css"></style> <div id="ct" class="ct2 wp cl"> <div class="mn"> <div class="bm_haa cl"> <div class="bm_h cl"> <a href="http://www.oecr.com/portal.php?mod=rss&catid=57" class="y xi2 rss" target="_blank" title="RSS">订阅</a><h1 class="xs2">文章</h1> </div></div> <div class="kjkjb"> <div class="bm vw" style="margin-bottom:0;"> <div class="h hm"> <div class="zxtoux"><img src="http://www.oecr.com/uc_server/avatar.php?uid=10207&size=small" /></div> <h1 class="ph">我国首台自主知识产权12英寸半导体设备进入韩国市场 </h1> <p class="xg1"> 时间：2010-6-17 23:17<a class="zz" href="home.php?mod=space&uid=10207">作者：乏味</a> 阅读<em id="_viewnum">(1287)</em> 评论: 0</p> <div class="zxfb" ><a href="http://www.oecr.com/portal.php?mod=rss&catid=57" class="y xi2 rss" target="_blank" title="RSS">订阅</a></div> </div> <!--[diy=diysummarytop]--><div id="diysummarytop" class="area"></div><!--[/diy]--> <div class="s"> <div class="ss"><div><span>导读： </span>位于上海浦东张江高科技园区的盛美半导体设备（上海）有限公司12英寸45纳米半导体单片清洗设备，11日正式启运运往韩国知名存储器厂商海力士，这也是国内首台具有自主知识产权的高端12英寸半导体设备进入韩国市场。</div> </div> <!--[diy=diysummarybottom]--><div id="diysummarybottom" class="area"></div><!--[/diy]--> <div class="d"> <!--[diy=diycontenttop]--><div id="diycontenttop" class="area"></div><!--[/diy]--> <table cellpadding="0" cellspacing="0" class="vwtb"><tr><td id="article_content"><P><A href="http://www.oecr.com/data/attachment/portal/201006/17/2316466ryyqh40h4rm46tr.jpg" target=_blank><IMG src="http://www.oecr.com/data/attachment/portal/201006/17/2316466ryyqh40h4rm46tr.jpg"></A></P>位于上海浦东张江高科技园区的盛美<a href="http://sensor.oecr.com" target="_blank" class="relatedlink">半导体</a>设备（上海）有限公司12英寸45<a href="http://material.oecr.com" target="_blank" class="relatedlink">纳米</a>半导体单片清洗设备，11日正式启运运往韩国知名存储器厂商海力士，这也是国内首台具有自主知识产权的高端12英寸半导体设备进入韩国市场。<BR><BR>盛美半导体设备（上海）有限公司首席执行官王晖博士介绍说，这台设备作为量产设备，装备了8个独立的清洗腔，并运用全球独有的、具有自主知识产权的SAPS兆声波（空间交变相移技术），最大产出率可达到每小时400片，为45纳米和32纳米节点硅片清洗提供了高效、零损伤的颗粒及污染去除方案。<BR><BR>当今半导体清洗技术中的最大难题是对<a href="http://machine.oecr.com" target="_blank" class="relatedlink">机械</a>损伤和去除效率的控制。随着半导体芯片体积的不断缩小，影响硅片良率的粒子也越来越小，颗粒越小则越难清洗；同时，45纳米以下芯片的门电极与电容结构越来越脆弱，在清洗中避免损伤芯片微结构的难度也在不断加大。<BR><BR>兆声波技术能够通过气穴振荡来推动微颗粒离开硅片表面，但技术难点在于如何控制兆声波在硅片表面的能量。王晖博士介绍说，由盛美半导体自主研发的SAPS兆声波技术，利用空间交变相移原理可以对兆声波的能量进行精确控制，将12英寸硅片面内兆声波非均匀度控制在2%以内，一举解决了困扰业界多年的棘手问题。</td></tr></table> <!--[diy=diycontentbottom]--><div id="diycontentbottom" class="area"></div><!--[/diy]--> <script src="data/cache/home.js?eOg" type="text/javascript"></script> <div id="click_div"><table cellpadding="0" cellspacing="0" class="atd"> <tr><td> <a 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