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type="text/css"></style> <div id="ct" class="ct2 wp cl"> <div class="mn"> <div class="bm_haa cl"> <div class="bm_h cl"> <a href="http://www.oecr.com/portal.php?mod=rss&catid=62" class="y xi2 rss" target="_blank" title="RSS">订阅</a><h1 class="xs2">文章</h1> </div></div> <div class="kjkjb"> <div class="bm vw" style="margin-bottom:0;"> <div class="h hm"> <div class="zxtoux"><img src="http://www.oecr.com/uc_server/avatar.php?uid=54876&size=small" /></div> <h1 class="ph">一份关于准分子激光器原理和应用的清单 </h1> <p class="xg1"> 时间：2017-7-20 09:43<a class="zz" href="home.php?mod=space&uid=54876">作者：update</a> 阅读<em id="_viewnum">(1590)</em> 评论: <a href="http://www.oecr.com/portal.php?mod=comment&id=5878&idtype=aid" title="查看全部评论"><em id="_commentnum">5</em></a></p> <div class="zxfb" ><a href="http://www.oecr.com/portal.php?mod=rss&catid=62" class="y xi2 rss" target="_blank" title="RSS">订阅</a></div> </div> <!--[diy=diysummarytop]--><div id="diysummarytop" class="area"></div><!--[/diy]--> <div class="s"> <div class="ss"><div><span>导读： </span>今天为大家带来的是准分子激光器原理和应用的清单。</div> </div> <!--[diy=diysummarybottom]--><div id="diysummarybottom" class="area"></div><!--[/diy]--> <div class="d"> <!--[diy=diycontenttop]--><div id="diycontenttop" class="area"></div><!--[/diy]--> <table cellpadding="0" cellspacing="0" class="vwtb"><tr><td id="article_content"><div style="text-align: center;"> <a href="data/attachment/portal/201707/20/094239jt1bqyxbm3tr1lll.jpg" target="_blank" style="line-height: 1.8em;"><img src="data/attachment/portal/201707/20/094239jt1bqyxbm3tr1lll.jpg"></a></div><div style="text-align: center;"><br></div><div style="text-align: center;">南京光研代理的准分子<a href="http://laser.oecr.com" target="_blank" class="relatedlink">激光</a>器</div><div><br></div><div> 1，准分子激光，是指受激二聚体所产生的激光。之所以产生称为准分子，是因为它不是稳定的分子，是在激光混合气体受到外来能量的激发所引起的一系列<a href="http://theory.oecr.com" target="_blank" class="relatedlink">物理</a>及化学反应中曾经形成但转瞬即逝的分子，其寿命仅为几十毫微秒。</div><div><br></div><div> 2，准分激光是一种气体脉冲激光，所产生的是波长为193nm的准分子激光，它是一种超紫外线光波，此波长的激光吸收范围窄，激光的能量几乎完全被角膜上皮细胞和基质吸收，超过这个范围的组织不会吸收到激光，每一个激光脉冲可以切削0.2到0.25um厚度的生物组织，所以周围的组织不会损伤。</div><div><br></div><div> 3，准分子激光与生物组织作用时发生的不是热效应，而是光化反应，所谓光化反应，是指组织受到远紫外光激光作用时，会断裂分子之间的结合键，将组织直接分离成挥发性的碎片而消散无踪，对周围组织则没有影响，达到对角膜的重塑目的，能精确消融人眼角膜预计去除的部分空间精确度达细胞水平，不损伤周围组织。它的波长短，不会穿透人的眼角膜，因此对于眼球内部的组织没有任何不良的作用。</div><div><br></div><div> 4，准分子激光在医学上主要用于屈光不正的治疗，如用PRK、LASIK、LASEK等方法进行屈光不正的治疗，是目前临床上应用比较普遍、安全、快捷、有效、稳定的屈光不正治疗方法。</div><div><br></div><div> 5，准分子激光首先被应用在工业上:美国IBM公司开始使用并且改进准分子激光技术，主要应用在计算机芯片的制造以及塑料物质上蚀刻精确的图形。1980年IBM公司应用193nm准分子激光刨光钻石。1982年IBM将准分子激光技术应用在<a href="http://sensor.oecr.com" target="_blank" class="relatedlink">半导体</a>光刻<a href="http://optics.oecr.com" target="_blank" class="relatedlink">工艺</a>中.1986年AT&T贝尔实验室研制出第一台准分子激光分步投影光刻机.同时也广泛应用在临床医学以及科学研究与工业应用方面，如：钻孔、标记表面处理、激光化学气相沉积，物理气相沉积，磁头与光学镜片和硅晶圆的清洁等方面,微<a href="http://machine.oecr.com" target="_blank" class="relatedlink">机电</a>系统相关的微制造技术。</div><div><br></div><div> 6，与其他气体激光器不同，准分子激光器在应用方面的数目和种类不断的增多。这是因为，准分子激光器所独有的特性和性能，这使得准分子激光器能满足很多的<a href="http://material.oecr.com" target="_blank" class="relatedlink">材料</a><a href="http://optics.oecr.com" target="_blank" class="relatedlink">加工</a>的需要。其独有的特性也使得它很好的被用于新兴的技术中。目前，主要有两个方面应用：1)材料的切除2)光学材料的加工，尤其是打孔，划线，微加工，和其他方面的加工，在这些加工中，其特征尺寸缩小且超出了<a href="http://machine.oecr.com" target="_blank" class="relatedlink">机械</a>加工的范围。准分子材料切除的本质是光烧蚀，它几乎没有热影响区域，而且使用准分子时，切口干净而且轮廓分明。这些特点使得它十分适合进行亚微米范围的微加工。此外，短波长的紫外(UV)准分子辐射很容易被许多材料所吸收，使得它不论对硬质材料(如,硅和陶瓷)还是对软质聚合物都能进行有效加工。紫外准分子激光波长的范围较广，这意味着，基本上对于任何需要加工的材料都能够找到合适的波长。大型的多模平顶准分子光束让大面积图案制作所需的光束整形和掩膜技术成为可能，使得加工效率更高，且能得到复杂的三维图案。</div><div><br></div><div> 7，准分子激光器输出的矩形光束其最大的尺寸可以达到几个厘米。这一特性，与准分子激光器的高脉冲能量和低重复频率相结合，使得准分子激光器很适合与光掩膜技术结合在大范围内加工得到大量重复的图案。与此相反，由许多固态激光器得到的光束通常被聚焦成小光斑，并用振镜进行扫描。这个技术被称为直接写入法，直接写入法具有的点状的本质让它具有特有的应用范围，比如，圆晶的划线和晶粒的切割。然而，直接写入式微加工其劣势在于，它无法以固定的深度来去除较大面积的材料，因为小光束的逐行扫描会留下刻痕。</div><div><br></div><div> 8，准分子激光器线光束系统能够加工智能手机和OLED电视所需的有源矩阵驱动液晶<a href="http://display.oecr.com" target="_blank" class="relatedlink">显示</a>屏（AMLCD）和主动矩阵有机<a href="http://light.oecr.com" target="_blank" class="relatedlink">发光</a>二极管面板（AMOLED）。在最新的ELA系统中，由精巧的柱面光具传输出均匀的线形光束（尺寸为750 mm×0.4 mm），可对第八代面板实现快速退火。</div><div><br></div><div><p style="text-align: center;"><a href="data/attachment/portal/201707/20/094345rwpogwowc8gb83pv.jpg" target="_blank"><img src="data/attachment/portal/201707/20/094345rwpogwowc8gb83pv.jpg"></a></p><p style="text-align: center;"><br></p><p style="text-align: center;"><span style="line-height: 25.2px;">欢迎关注光电<a href="http://news.oecr.com" target="_blank" class="relatedlink">资讯</a>微信公众号，每天将由光电工程师<a href="http://club.oecr.com" target="_blank" class="relatedlink">社区</a>网站(oecr.com)编辑团队为您精选行业动态，科技资讯，技术解析，光电<a href="http://www.oecr.com/portal.php?mod=list&catid=62" target="_blank" class="relatedlink">科普</a>等精彩内容，欢迎交换友情链接</span><span style="line-height: 25.2px;">(</span><b style="line-height: 25.2px;"><a 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</dl><a name="comment_anchor_13584"></a> <dl id="comment_13584_li" class="ptm pbm bbda cl"> <dt class="mbm"> <span class="y xw0 xi2"> <a href="javascript:;" onclick="portal_comment_requote(13584, '5878');">引用</a> </span> <a href="http://club.oecr.com/space-uid-65528.html" class="xi2 xw1" c="1">songylu</a> <span class="xg1 xw0">2017-7-20 15:55</span> </dt> <dd>专业抢沙发的！哈哈</dd> </dl><a name="comment_anchor_13582"></a> <dl id="comment_13582_li" class="ptm pbm bbda cl"> <dt class="mbm"> <span class="y xw0 xi2"> <a href="javascript:;" onclick="portal_comment_requote(13582, '5878');">引用</a> </span> <a href="http://club.oecr.com/space-uid-27875.html" class="xi2 xw1" c="1">kavinzhao</a> <span class="xg1 xw0">2017-7-20 14:55</span> </dt> <dd>我想找个光电同行互相帮助啊。</dd> </dl><a name="comment_anchor_13581"></a> <dl id="comment_13581_li" class="ptm pbm bbda cl"> <dt class="mbm"> <span class="y xw0 xi2"> <a href="javascript:;" onclick="portal_comment_requote(13581, '5878');">引用</a> </span> <a 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