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type="text/css"></style> <div id="ct" class="ct2 wp cl"> <div class="mn"> <div class="bm_haa cl"> <div class="bm_h cl"> <a href="http://www.oecr.com/portal.php?mod=rss&catid=62" class="y xi2 rss" target="_blank" title="RSS">订阅</a><h1 class="xs2">文章</h1> </div></div> <div class="kjkjb"> <div class="bm vw" style="margin-bottom:0;"> <div class="h hm"> <div class="zxtoux"><img src="http://www.oecr.com/uc_server/avatar.php?uid=54876&size=small" /></div> <h1 class="ph">可用于批量生产光学器件的混合硅激光器 </h1> <p class="xg1"> 时间：2017-7-5 09:57<a class="zz" href="home.php?mod=space&uid=54876">作者：update</a> 阅读<em id="_viewnum">(1359)</em> 评论: <a href="http://www.oecr.com/portal.php?mod=comment&id=5826&idtype=aid" title="查看全部评论"><em id="_commentnum">5</em></a>来自: 中国光学期刊网</p> <div class="zxfb" ><a href="http://www.oecr.com/portal.php?mod=rss&catid=62" class="y xi2 rss" target="_blank" title="RSS">订阅</a></div> </div> <!--[diy=diysummarytop]--><div id="diysummarytop" class="area"></div><!--[/diy]--> <div class="s"> <div class="ss"><div><span>导读： </span>在硅晶片上生产半导体激光器是电子行业长期以来的目标，但事实证明这种制造工艺极具挑战性。现在，A*STAR研究所的研究人员开发了一种新制造方法，这种方法便宜、简单而且可扩展性强。</div> </div> <!--[diy=diysummarybottom]--><div id="diysummarybottom" class="area"></div><!--[/diy]--> <div class="d"> <!--[diy=diycontenttop]--><div id="diycontenttop" class="area"></div><!--[/diy]--> <table cellpadding="0" cellspacing="0" class="vwtb"><tr><td id="article_content"><div> 在硅晶片上生产<a href="http://sensor.oecr.com" target="_blank" class="relatedlink">半导体</a><a href="http://laser.oecr.com" target="_blank" class="relatedlink">激光</a>器是<a href="http://electronic.oecr.com" target="_blank" class="relatedlink">电子</a>行业长期以来的目标，但事实证明这种制造<a href="http://optics.oecr.com" target="_blank" class="relatedlink">工艺</a>极具挑战性。现在，A*STAR研究所的研究人员开发了一种新制造方法，这种方法便宜、简单而且可扩展性强。</div><div><br></div><div> 混合硅激光器将III-V族半导体（如砷化镓和磷化铟）的<a href="http://light.oecr.com" target="_blank" class="relatedlink">发光</a>特性与成熟的硅制造技术相结合。这些激光器引起了相当大的关注，因为它们可以将光子和微电子元件集成在一个单一的硅芯片，获得价格低廉、可批量生产的光学器件。它们具有广泛的应用前景，从短距离数据<a href="http://ofc.oecr.com" target="_blank" class="relatedlink">通信</a>到高速、长距离光传输。</div><div><br></div><div> 然而，在目前的生产过程中，在单独的III-V半导体晶片上制造激光器，然后将其单独对准每个硅器件——这是耗时又昂贵的工艺，限制了芯片上激光器的数量。为了克服这些局限性，来自A*STAR数据存储研究所的Doris Keh-Ting Ng及其同事开发了一种用于生产混合III-V半导体和绝缘体上硅<a href="http://opticalfilm.oecr.com" target="_blank" class="relatedlink">薄膜</a>（SOI）光学微腔的创新方法。这大大降低了制造工艺的复杂性，使器件结构更加紧凑。</div><div><br></div><div><p style="text-align: center;"><a href="data/attachment/portal/201707/05/095655lsjapptpipiikiyt.jpg" target="_blank"><img src="data/attachment/portal/201707/05/095655lsjapptpipiikiyt.jpg"></a></p></div><div><br></div><div style="text-align: center;"> 500nm直径微盘的斜角扫描电子显微镜图像。图片由A*STAR数据存储研究所提供</div><div><br></div><div> “蚀刻整个腔体是非常有挑战性的，”Ng说。“目前，没有一个单一的蚀刻配方和掩模，允许能在整个微腔蚀刻，所以我们决定开发一种新的方法。”</div><div><br></div><div> 通过首先使用SOI层间热键合工艺将III-V半导体薄膜附着到氧化硅（SiO2）晶片上，它们产生很强的键合，消除了对氧化剂如食人鱼刻蚀液或氢氟酸的需要。而且通过使用双硬掩模技术来蚀刻到预期层的微腔，他们消除了使用多重覆盖光刻和蚀刻周期的要求——这是一个具有挑战性的过程。</div><div><br></div><div> Ng解释说：“我们的方法减少了制造步骤数，减少了危险化学品的使用，并且整个过程只需要一个光刻步骤来完成。”<span style="line-height: 1.8em;">该工作首次引入了一种新的异质核配置和集成制造工艺，它将低温SiO2层间键合与双硬掩模、单光刻图案结合起来。</span><span style="line-height: 1.8em;">Ng说：“这一过程不仅能制造出异质核器件，而且大大减少了制造工艺的难度，并且可以作为研究领域的另一种混合微腔使用。”</span></div><div><span style="line-height: 1.8em;"><br></span></div><div><p style="text-align: center;"><a href="data/attachment/portal/201707/05/095715cdd1zdw9zjwjaqhr.jpg" target="_blank"><img src="data/attachment/portal/201707/05/095715cdd1zdw9zjwjaqhr.jpg"></a></p><p style="text-align: center;"><br></p><p style="text-align: center;"><span style="line-height: 25.2px;">欢迎关注光电<a href="http://news.oecr.com" target="_blank" class="relatedlink">资讯</a>微信公众号，每天将由光电工程师<a href="http://club.oecr.com" target="_blank" class="relatedlink">社区</a>网站(oecr.com)编辑团队为您精选行业动态，科技资讯，技术解析，光电<a 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