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type="text/css"></style> <div id="ct" class="ct2 wp cl"> <div class="mn"> <div class="bm_haa cl"> <div class="bm_h cl"> <a href="http://www.oecr.com/portal.php?mod=rss&catid=62" class="y xi2 rss" target="_blank" title="RSS">订阅</a><h1 class="xs2">文章</h1> </div></div> <div class="kjkjb"> <div class="bm vw" style="margin-bottom:0;"> <div class="h hm"> <div class="zxtoux"><img src="http://www.oecr.com/uc_server/avatar.php?uid=54876&size=small" /></div> <h1 class="ph">中小功率系列准分子激光器的应用 </h1> <p class="xg1"> 时间：2016-7-15 17:03<a class="zz" href="home.php?mod=space&uid=54876">作者：update</a> 阅读<em id="_viewnum">(1808)</em> 评论: <a href="http://www.oecr.com/portal.php?mod=comment&id=4632&idtype=aid" title="查看全部评论"><em id="_commentnum">5</em></a>来自: 光电工程师社区</p> <div class="zxfb" ><a href="http://www.oecr.com/portal.php?mod=rss&catid=62" class="y xi2 rss" target="_blank" title="RSS">订阅</a></div> </div> <!--[diy=diysummarytop]--><div id="diysummarytop" class="area"></div><!--[/diy]--> <div class="s"> <div class="ss"><div><span>导读： </span>中科院安徽光学精密机械研究所从上世纪80年代开始准分子激光器的研制开发。实用化准分子激光器的研制成果曾多次获中科院科技进步奖。承担了国家重大科技专项、中科院科技攻关等准分子激光器研制项目，也为市场提供了 ...</div> </div> <!--[diy=diysummarybottom]--><div id="diysummarybottom" class="area"></div><!--[/diy]--> <div class="d"> <!--[diy=diycontenttop]--><div id="diycontenttop" class="area"></div><!--[/diy]--> <table cellpadding="0" cellspacing="0" class="vwtb"><tr><td id="article_content"><p style="text-align: left;"><span style="font-size: 10pt; line-height: 1.8em;">前期,光电工程师<a href="http://club.oecr.com" target="_blank" class="relatedlink">社区</a>光电<a href="http://www.oecr.com/portal.php?mod=list&catid=62" target="_blank" class="relatedlink">科普</a>栏目发表了一篇关于准分子<a href="http://laser.oecr.com" target="_blank" class="relatedlink">激光</a>器的原理及特性的文章，现在主要向大家介绍中小功率系列准分子激光器的应用方向,主要有三个方面:1.工业应用;2.科研应用;3.<a href="http://medicine.oecr.com" target="_blank" class="relatedlink">医疗</a>应用.</span></p><p style="margin:0cm;margin-bottom:.0001pt"><b><font color="#000080" size="4">1.工业应用</font></b></p><p style="margin:0cm;margin-bottom:.0001pt"><span style="font-size: 13.3333px;"><b>1.1<a href="http://sensor.oecr.com" target="_blank" class="relatedlink">半导体</a>集成<a href="http://electronic.oecr.com" target="_blank" class="relatedlink">电路</a>光刻</b></span></p><p style="margin:0cm;margin-bottom:.0001pt"><span style="font-size: 13.3333px;">大规模半导体集成电路制造<a href="http://optics.oecr.com" target="_blank" class="relatedlink">工艺</a>：光刻,</span><span style="font-size: 13.3333px; line-height: 1.8em;">光刻技术作为制备半导体器件的关键技术之一，制约着半导体工业的发展和半导体器件的性能。</span></p><p style="text-align: center;"><a href="data/attachment/portal/201607/15/163443vhuwwu1u9u3xxxu3.png" target="_blank"><img src="data/attachment/portal/201607/15/163443vhuwwu1u9u3xxxu3.png"></a></p><div><br></div><p style="margin:0cm;margin-bottom:.0001pt"><span style="font-size: 13.3333px;"><b>1.2液晶<a href="http://display.oecr.com" target="_blank" class="relatedlink">显示</a>器<a href="http://opticalfilm.oecr.com" target="_blank" class="relatedlink">薄膜</a><a href="http://material.oecr.com" target="_blank" class="relatedlink">晶体</a>管的低温退火--液晶显示器</b></span></p><p><a href="data/attachment/portal/201607/15/163552asxwtn0klmm8swkm.png" target="_blank"><img src="data/attachment/portal/201607/15/163552asxwtn0klmm8swkm.png"></a></p><p style="text-align: center; margin: 0cm 0cm 0.0001pt;"><span style="font-size: 13.3333px;">多晶硅薄膜晶体管：更高的对比度和分辨率、低能耗、高响应速度</span></p><p style="text-align: center; margin: 0cm 0cm 0.0001pt;"><span style="font-size: 13.3333px;"><b><br></b></span></p><p style="margin:0cm;margin-bottom:.0001pt"><span style="font-size: 13.3333px;"><b>1.3刻蚀高密度电路板</b></span></p><p style="margin:0cm;margin-bottom:.0001pt"><span style="font-size: 13.3333px;">准分子激光干刻蚀方法制作印刷电路板一般采用大功率准分子激光器，以单脉冲1050mJ，重复频率300Hz准分子激光器为例，单个激光脉冲可以成形400mm2的电路，面积覆盖速度达1200cm2/s。而当基板表面金属层约40nm时，一个脉冲即可以形成线宽10μm的电路.</span></p><p style="text-align: center;"><a href="data/attachment/portal/201607/15/164209ijna77jqjvwj5eel.png" target="_blank"><img src="data/attachment/portal/201607/15/164209ijna77jqjvwj5eel.png"></a></p><p style="margin:0cm;margin-bottom:.0001pt"><span style="font-size: 13.3333px;">准分子激光干刻蚀法可以采用多种柔性基片制作柔性电路板，如PET（聚对苯二甲酸乙二醇酯）、polyimide（聚酰亚胺）、PEN（聚萘二甲酸乙二醇酯）和PMMA（聚甲基丙烯酸甲酯，有机玻璃）等，有利于<a href="http://electronic.oecr.com" target="_blank" class="relatedlink">电子</a>器件的小型化和降低生产成本</span></p><p style="margin:0cm;margin-bottom:.0001pt"><span style="font-size: 13.3333px;"><b><br></b></span></p><p style="margin:0cm;margin-bottom:.0001pt"><span style="font-size: 13.3333px;"><b>1.4制作光纤布拉格光栅--光纤<a href="http://sensor.oecr.com" target="_blank" class="relatedlink">传感</a>器</b></span></p><p style="margin:0cm;margin-bottom:.0001pt"><span style="font-size: 13.3333px;">•<span class="Apple-tab-span" style="white-space: pre;"> </span>光纤布拉格光栅( FBG) 是一种使用深紫外激光束直接写入法在单模光纤上刻有沿轴向折射率变化光栅的传感器件, 主要用来检测拉力、形变和温度等, 广泛地应用于公路、桥梁、化学和生物传感检测方面。</span></p><p style="text-align: center;"><a href="data/attachment/portal/201607/15/164331qjs53ssv5pzsv3rh.png" target="_blank"><img src="data/attachment/portal/201607/15/164331qjs53ssv5pzsv3rh.png"></a></p><p style="margin:0cm;margin-bottom:.0001pt"></p><p style="margin:0cm;margin-bottom:.0001pt"><span style="font-size: 13.3333px;">•<span class="Apple-tab-span" style="white-space: pre;"> </span>当被激光束照射的时候，相位掩模板会产生规则的干涉条纹（如图）。增加准分子激光器的空间相干长度，能够在相位板后面产生对比度高的干涉条纹。相位板通常距离光纤纤芯100~200μm。</span><span lang="EN-US" style="text-indent: -18pt; line-height: 1.8em; font-family: Georgia, serif;">•<span style="font-stretch: normal; font-size: 7pt; line-height: normal; font-family: 'Times New Roman';"> </span></span><span style="text-indent: -18pt; line-height: 1.8em; font-family: 宋体;">分别用大光斑相位掩模法静态刻写和小光斑相位掩模法扫描刻写的光栅</span></p><p style="margin:0cm;margin-bottom:.0001pt"><span style="font-size: 13.3333px;"><b>1.5金属、陶瓷等<a href="http://material.oecr.com" target="_blank" class="relatedlink">材料</a>的激光标记—宝石刻字等</b></span></p><p style="text-align: center;"><a href="data/attachment/portal/201607/15/164527g72gttt2qr123j9p.png" target="_blank"><img src="data/attachment/portal/201607/15/164527g72gttt2qr123j9p.png"></a></p><p style="margin:0cm;margin-bottom:.0001pt"><span style="font-size: 13.3333px;"><b>1.6喷墨打印机喷嘴钻孔</b></span></p><p style="margin:0cm;margin-bottom:.0001pt"><span style="font-size: 13.3333px;">•<span class="Apple-tab-span" style="white-space: pre;"> </span>准分子激光钻孔是目前用于喷墨打印机油墨喷嘴生产中的一种主要<a href="http://optics.oecr.com" target="_blank" class="relatedlink">加工</a>方法。</span></p><p style="text-align: center;"><a href="data/attachment/portal/201607/15/164506hsp2zzqwu8865372.png" target="_blank"><img src="data/attachment/portal/201607/15/164506hsp2zzqwu8865372.png"></a></p><p style="margin:0cm;margin-bottom:.0001pt"><span style="font-size: 13.3333px;"><b>1.7微结构的制作</b></span></p><p style="text-align: center;"><a href="data/attachment/portal/201607/15/164603uawos8obuwiy8bir.png" target="_blank"><img src="data/attachment/portal/201607/15/164603uawos8obuwiy8bir.png"></a><a href="data/attachment/portal/201607/15/164603rf2bfh28toqoolqv.png" target="_blank" style="line-height: 1.8em;"><img src="data/attachment/portal/201607/15/164603rf2bfh28toqoolqv.png"></a></p><p style="margin:0cm;margin-bottom:.0001pt"><span style="font-size: 13.3333px;"><b><br></b></span></p><p style="margin:0cm;margin-bottom:.0001pt"><span style="font-size: 13.3333px;"><b>1.8细导线绝缘层的剥离等</b></span></p><p style="text-align: center;"><a href="data/attachment/portal/201607/15/163659zvav43tkywvtbwjb.png" target="_blank"><img src="data/attachment/portal/201607/15/163659zvav43tkywvtbwjb.png"></a></p><p style="margin:0cm;margin-bottom:.0001pt"><span style="font-size: 13.3333px;">准分子激光剥离技术用于LED制作工艺,在LED芯片直接受到高能量密度的紫外激光脉冲的照射，由于蓝宝石基底带隙很高，相对于248nm激光而言是透明的，所以激光脉冲会透过蓝宝石基底打到GaN层，而GaN和蓝宝石的连接层处（约2nm）会强烈吸收紫外激光能量，在激光能量密度为800~900J/cm2时，接触层的局部区域温度可以达到大约1000 ℃，导致连接层的材料产生气化，从而使蓝宝石衬底与GaN芯片安全分离</span></p><div><span style="line-height: 1.8em;"><br></span></div><p style="margin:0cm;margin-bottom:.0001pt"><b><font size="4">2. 科研应用</font></b></p><p style="margin:0cm;margin-bottom:.0001pt"><span style="font-size: 13.3333px;"><b></b></span></p><p style="margin:0cm;margin-bottom:.0001pt"><span style="font-size: 13.3333px;">科研应用中，准分子激光器被广泛的应用于光谱学、表面科学、材料科学和反应动力学等学科的研究中。</span></p><p style="margin:0cm;margin-bottom:.0001pt"><span style="font-size: 13.3333px;"><b>2.1脉冲激光沉积设备—材料学</b></span></p><p style="text-align: center;"><a href="data/attachment/portal/201607/15/164834g2w92z6tr6lrwjl2.jpg" target="_blank"><img src="data/attachment/portal/201607/15/164834g2w92z6tr6lrwjl2.jpg"></a></p><p style="text-align: center;">脉冲准分子激光沉积薄膜</p><p style="margin:0cm;margin-bottom:.0001pt"><br></p><p style="margin:0cm;margin-bottom:.0001pt"><b><font size="4">3.医疗应用</font></b></p><p style="margin:0cm;margin-bottom:.0001pt"><span style="font-size: 13.3333px;">准分子激光的光子能量高，可以有效的切断组织分子内化学链而不产生过多的热能，能最大限度地减小受伤组织范围。另外，准分子激光衍射极限小，切割的深度和宽度都非常精细。因此在医疗领域，准分子激光也同样应用广泛。包括激光近视眼校正手术，白癜风皮肤病治疗等。</span></p><p style="margin:0cm;margin-bottom:.0001pt"><span style="font-size: 13.3333px;"><b>3.1激光近视眼校正手术</b></span></p><p class="MsoNormal"><span style="font-family:宋体;mso-ascii-font-family:Calibri; mso-hansi-font-family:Calibri">目前眼科行业广泛采用ＰＲＫ，ＰＴＫ和ＬＡＳＩＫ等手术对近视、散光、远视进行矫正</span><span lang="EN-US"><o:p></o:p></span></p><p style="text-align: center;"><a href="data/attachment/portal/201607/15/164715xaz0uzstzfkgjs3f.jpg" target="_blank"><img src="data/attachment/portal/201607/15/164715xaz0uzstzfkgjs3f.jpg"></a></p><p>中科院安徽光学精密<a href="http://machine.oecr.com" target="_blank" class="relatedlink">机械</a>研究所从上世纪80年代开始准分子激光器的研制开发。实用化准分子激光器的研制成果曾多次获中科院科技进步奖。承担了国家重大科技专项、中科院科技攻关等准分子激光器研制项目，也为市场提供了用于科研、医疗、定标和工业的多种准分子激光器。中科院安徽光学精密机械研究所是国内最早从事准分子激光器研制的单位之一，也是目前国内唯一一家能够提供准分子激光器<a href="http://b.oecr.com/sell" target="_blank" class="relatedlink">产品</a>的单位。</p><p>安徽中科艾克西玛光电科技有限公司是依托中科院核心技术，在安徽建立了中国首家准分子激光器及设备生产和研发基地，致力于创建国产化准分子激光器及准分子激光工业和医疗设备产品品牌。南京光研<a href="http://opticaldesign.oecr.com" target="_blank" class="relatedlink">软件</a>系统有限公司成为其独家代理.</p><p style="text-align: center;"><a href="data/attachment/portal/201607/15/165843e2c1gz6tpavmye2f.png" target="_blank"><img src="data/attachment/portal/201607/15/165843e2c1gz6tpavmye2f.png"></a></p><p> 艾克西玛公司准分子激光产品的客户包括国内众多大学和<a href="http://b.oecr.com/company" target="_blank" class="relatedlink">企业</a>。以PLD科研设备为例，我们提供了国内数十家用户单位，包括：中国科技大学、北京大学、大连理工大学、广东工业大学、中国原子能科学研究院、中科院固体<a href="http://theory.oecr.com" target="_blank" class="relatedlink">物理</a>研究所、国家计量局等。</p><div style="text-align: center;"><p><a href="data/attachment/portal/201607/15/170243w44ygz880oyxyo8o.jpg" target="_blank"><img src="data/attachment/portal/201607/15/170243w44ygz880oyxyo8o.jpg"></a></p><p class="MsoNormal" align="left" style="text-align: center;"><span 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