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type="text/css"></style> <div id="ct" class="ct2 wp cl"> <div class="mn"> <div class="bm_haa cl"> <div class="bm_h cl"> <a href="http://www.oecr.com/portal.php?mod=rss&catid=62" class="y xi2 rss" target="_blank" title="RSS">订阅</a><h1 class="xs2">文章</h1> </div></div> <div class="kjkjb"> <div class="bm vw" style="margin-bottom:0;"> <div class="h hm"> <div class="zxtoux"><img src="http://www.oecr.com/uc_server/avatar.php?uid=54876&size=small" /></div> <h1 class="ph">准分子激光器简介 </h1> <p class="xg1"> 时间：2016-1-19 13:22<a class="zz" href="home.php?mod=space&uid=54876">作者：update</a> 阅读<em id="_viewnum">(2523)</em> 评论: <a href="http://www.oecr.com/portal.php?mod=comment&id=3865&idtype=aid" title="查看全部评论"><em id="_commentnum">5</em></a></p> <div class="zxfb" ><a href="http://www.oecr.com/portal.php?mod=rss&catid=62" class="y xi2 rss" target="_blank" title="RSS">订阅</a></div> </div> <!--[diy=diysummarytop]--><div id="diysummarytop" class="area"></div><!--[/diy]--> <div class="s"> <div class="ss"><div><span>导读： </span>准分子激光器是以稀有气体或稀有气体的卤化物为工作物质的气体激光器，主要发射紫外波段的脉冲激光；目前常见的有ArF（193nm）、KrF（248nm）、XeCl（308nm）和XeF（351nm）等。 一、为什么叫“准分子”？ 准分子Exc ...</div> </div> <!--[diy=diysummarybottom]--><div id="diysummarybottom" class="area"></div><!--[/diy]--> <div class="d"> <!--[diy=diycontenttop]--><div id="diycontenttop" class="area"></div><!--[/diy]--> <table cellpadding="0" cellspacing="0" class="vwtb"><tr><td id="article_content"><p class="MsoNormal"><span style="font-family: 宋体; mso-ascii-font-family: Calibri; mso-hansi-font-family: Calibri;"> 准分子<a href="http://laser.oecr.com" target="_blank" class="relatedlink">激光</a>器是以稀有气体或稀有气体的卤化物为工作物质的气体激光器，主要发射紫外波段的脉冲激光；目前常见的有</span><span lang="EN-US">ArF</span><span style="font-family: 宋体; mso-ascii-font-family: Calibri; mso-hansi-font-family: Calibri;">（</span><span lang="EN-US">193nm</span><span style="font-family: 宋体; mso-ascii-font-family: Calibri; mso-hansi-font-family: Calibri;">）、</span><span lang="EN-US">KrF</span><span style="font-family: 宋体; mso-ascii-font-family: Calibri; mso-hansi-font-family: Calibri;">（</span><span lang="EN-US">248nm</span><span style="font-family: 宋体; mso-ascii-font-family: Calibri; mso-hansi-font-family: Calibri;">）、</span><span lang="EN-US">XeCl</span><span style="font-family: 宋体; mso-ascii-font-family: Calibri; mso-hansi-font-family: Calibri;">（</span><span lang="EN-US">308nm</span><span style="font-family: 宋体; mso-ascii-font-family: Calibri; mso-hansi-font-family: Calibri;">）和</span><span lang="EN-US">XeF</span><span style="font-family: 宋体; mso-ascii-font-family: Calibri; mso-hansi-font-family: Calibri;">（</span><span lang="EN-US">351nm</span><span style="font-family: 宋体; mso-ascii-font-family: Calibri; mso-hansi-font-family: Calibri;">）等。</span><span lang="EN-US"><o:p></o:p></span></p><p style="text-align: center;"><a class="opattach" href="javascript:;"><img width="319" height="89" class="cur1" style="width: 374px; height: 119px;" onclick="insertImage('data/attachment/portal/201601/19/134000jidf6dd446tdda1h.jpg');" src="http://www.oecr.com/data/attachment/portal/201601/19/134000jidf6dd446tdda1h.jpg.thumb.jpg"> </a></p> <p class="MsoNormal"><span style="font-family: 宋体; mso-ascii-font-family: Calibri; mso-hansi-font-family: Calibri;">一、为什么叫“准分子”？</span><span lang="EN-US"><o:p></o:p></span></p> <p class="MsoNormal"><span style="font-family: 宋体; mso-ascii-font-family: Calibri; mso-hansi-font-family: Calibri;">准分子</span><span lang="EN-US">Excimer</span><span style="font-family: 宋体; mso-ascii-font-family: Calibri; mso-hansi-font-family: Calibri;">是</span><span lang="EN-US">Excited Dimers or Trimers</span><span style="font-family: 宋体; mso-ascii-font-family: Calibri; mso-hansi-font-family: Calibri;">的简写，意思为常态下不存在，受激条件下才形成的双核或三核；</span><span lang="EN-US"><o:p></o:p></span></p><p style="text-align: center;"><a class="opattach" href="javascript:;"><img class="cur1" onclick="insertImage('data/attachment/portal/201601/19/134000h7cxnf4gd5s7zazs.jpg');" src="http://www.oecr.com/data/attachment/portal/201601/19/134000h7cxnf4gd5s7zazs.jpg.thumb.jpg"> </a></p> <p class="MsoNormal"><span style="font-family: 宋体; mso-ascii-font-family: Calibri; mso-hansi-font-family: Calibri;">以</span><span lang="EN-US">KrF</span><span style="font-family: 宋体; mso-ascii-font-family: Calibri; mso-hansi-font-family: Calibri;">准分子为例：</span><span lang="EN-US"><o:p></o:p></span></p><p style="text-align: center;"><a class="opattach" href="javascript:;"><img width="321" height="320" class="cur1" style="width: 337px; height: 320px;" onclick="insertImage('data/attachment/portal/201601/19/134000g91gle11n99jiq3q.jpg');" src="http://www.oecr.com/data/attachment/portal/201601/19/134000g91gle11n99jiq3q.jpg.thumb.jpg"> </a></p><p><font face="宋体"> Kr</font><span style="line-height: 1.8em; font-family: 宋体;">和</span><span lang="EN-US" style="line-height: 1.8em;">F2</span><span style="line-height: 1.8em; font-family: 宋体;">在常态下不会反应；</span><span style="line-height: 1.8em; font-family: 宋体;">受到能量激发时，产生高能态的</span><span lang="EN-US" style="line-height: 1.8em;">KrF</span><span style="line-height: 1.8em; font-family: 宋体;">准分子；</span><span style="line-height: 1.8em; font-family: 宋体;">极短的时间后（约</span><span lang="EN-US" style="line-height: 1.8em;">10ns</span><span style="line-height: 1.8em; font-family: 宋体;">），高能态的</span><span lang="EN-US" style="line-height: 1.8em;">KrF</span><span style="line-height: 1.8em; font-family: 宋体;">跳变至低能态，同时释放出光子；</span><span style="line-height: 1.8em; font-family: 宋体;">低能态为排斥态，即</span><span lang="EN-US" style="line-height: 1.8em;">KrF</span><span style="line-height: 1.8em; font-family: 宋体;">准分子恢复成互不反应的</span><span lang="EN-US" style="line-height: 1.8em;">Kr</span><span style="line-height: 1.8em; font-family: 宋体;">和</span><span lang="EN-US" style="line-height: 1.8em;">F2</span><span style="line-height: 1.8em; font-family: 宋体;">。</span></p> <p class="MsoNormal"><span style="font-family: 宋体; mso-ascii-font-family: Calibri; mso-hansi-font-family: Calibri;">二、准分子激光的特点</span><span lang="EN-US"><o:p></o:p></span></p> <p class="MsoNormal"><span lang="EN-US">1</span><span style="font-family: 宋体; mso-ascii-font-family: Calibri; mso-hansi-font-family: Calibri;">，原生紫外、深紫外波段，不需要其他处理；</span><span lang="EN-US"><o:p></o:p></span></p> <p class="MsoNormal"><span lang="EN-US">2</span><span style="font-family: 宋体; mso-ascii-font-family: Calibri; mso-hansi-font-family: Calibri;">，脉冲能量大、峰值功率高；</span><span lang="EN-US"><o:p></o:p></span></p> <p class="MsoNormal"><span lang="EN-US">3</span><span style="font-family: 宋体; mso-ascii-font-family: Calibri; mso-hansi-font-family: Calibri;">，光束相干性低；</span><span lang="EN-US"><o:p></o:p></span></p><p align="center"><a class="opattach" href="javascript:;"><img class="cur1" onclick="insertImage('data/attachment/portal/201601/19/134001zivvfidq502cc52j.jpg');" src="http://www.oecr.com/data/attachment/portal/201601/19/134001zivvfidq502cc52j.jpg.thumb.jpg"> </a> <a class="opattach" href="javascript:;"><img class="cur1" onclick="insertImage('data/attachment/portal/201601/19/134001p5jbj5qe51e536er.jpg');" src="http://www.oecr.com/data/attachment/portal/201601/19/134001p5jbj5qe51e536er.jpg.thumb.jpg"> </a><img class="cur1" onclick="insertImage('data/attachment/portal/201601/19/134001xwagiz5qk4rzedrr.jpg');" src="http://www.oecr.com/data/attachment/portal/201601/19/134001xwagiz5qk4rzedrr.jpg.thumb.jpg"></p><p align="center"><a class="opattach" href="javascript:;"><br></a></p> <p class="MsoNormal"><span style="font-family: 宋体; mso-ascii-font-family: Calibri; mso-hansi-font-family: Calibri;">三、准分子的应用</span></p> <p class="MsoNormal"><span lang="EN-US" style="line-height: 1.8em;">1.</span><span style="line-height: 1.8em; font-family: 宋体;">工业应用<a class="opattach" href="javascript:;"><font face="Tahoma"><span class="opattach_ctrl"> </span> </font></a></span></p> <p class="MsoNormal"><span style="font-family: 宋体; mso-ascii-font-family: Calibri; mso-hansi-font-family: Calibri;"><a href="http://sensor.oecr.com" target="_blank" class="relatedlink">半导体</a>集成<a href="http://electronic.oecr.com" target="_blank" class="relatedlink">电路</a>光刻</span><span lang="EN-US"><o:p></o:p></span></p> <p class="MsoNormal"><span style="font-family: 宋体; mso-ascii-font-family: Calibri; mso-hansi-font-family: Calibri;">液晶<a href="http://display.oecr.com" target="_blank" class="relatedlink">显示</a>器<a href="http://opticalfilm.oecr.com" target="_blank" class="relatedlink">薄膜</a><a href="http://material.oecr.com" target="_blank" class="relatedlink">晶体</a>管的低温退火</span><span lang="EN-US">--</span><span style="font-family: 宋体; mso-ascii-font-family: Calibri; mso-hansi-font-family: Calibri;">液晶显示器</span><span lang="EN-US"><o:p></o:p></span></p> <p class="MsoNormal"><span style="font-family: 宋体; mso-ascii-font-family: Calibri; mso-hansi-font-family: Calibri;">刻蚀高密度电路板</span><span lang="EN-US"><o:p></o:p></span></p> <p class="MsoNormal"><span style="font-family: 宋体; mso-ascii-font-family: Calibri; mso-hansi-font-family: Calibri;">制作光纤布拉格光栅</span><span lang="EN-US">--</span><span style="font-family: 宋体; mso-ascii-font-family: Calibri; mso-hansi-font-family: Calibri;">光纤<a href="http://sensor.oecr.com" target="_blank" class="relatedlink">传感</a>器</span><span lang="EN-US"><o:p></o:p></span></p> <p class="MsoNormal"><span style="font-family: 宋体; mso-ascii-font-family: Calibri; mso-hansi-font-family: Calibri;">金属、陶瓷等<a href="http://material.oecr.com" target="_blank" class="relatedlink">材料</a>的激光标记—宝石刻字等</span><span lang="EN-US"><o:p></o:p></span></p> <p class="MsoNormal"><span style="font-family: 宋体; mso-ascii-font-family: Calibri; mso-hansi-font-family: Calibri;">喷墨打印机喷嘴钻孔</span><span lang="EN-US"><o:p></o:p></span></p> <p class="MsoNormal"><span style="font-family: 宋体; mso-ascii-font-family: Calibri; mso-hansi-font-family: Calibri;">微结构的制作</span><span lang="EN-US"><o:p></o:p></span></p> <p class="MsoNormal"><span style="font-family: 宋体; mso-ascii-font-family: Calibri; mso-hansi-font-family: Calibri;">细导线绝缘层的剥离等</span><span lang="EN-US"><o:p></o:p></span></p> <p class="MsoNormal"><span lang="EN-US">2. </span><span style="font-family: 宋体; mso-ascii-font-family: Calibri; mso-hansi-font-family: Calibri;">科研应用</span><span lang="EN-US"><o:p></o:p></span></p> <p class="MsoNormal"><span style="font-family: 宋体; mso-ascii-font-family: Calibri; mso-hansi-font-family: Calibri;">脉冲激光沉积设备—材料学</span><span lang="EN-US"><o:p></o:p></span></p> <p class="MsoNormal"><span style="font-family: 宋体; mso-ascii-font-family: Calibri; mso-hansi-font-family: Calibri;">激光化学、光谱学<a href="http://theory.oecr.com" target="_blank" class="relatedlink">物理</a>等实验仪器</span><span lang="EN-US"><o:p></o:p></span></p> <p class="MsoNormal"><span lang="EN-US">3.</span><span style="font-family: 宋体; mso-ascii-font-family: Calibri; mso-hansi-font-family: Calibri;"><a href="http://medicine.oecr.com" target="_blank" class="relatedlink">医疗</a>应用</span><span lang="EN-US"><o:p></o:p></span></p> <p class="MsoNormal"><span style="font-family: 宋体; mso-ascii-font-family: Calibri; mso-hansi-font-family: Calibri;">激光近视眼校正手术</span><span lang="EN-US"><o:p></o:p></span></p> <p class="MsoNormal"><span style="font-family: 宋体; mso-ascii-font-family: Calibri; mso-hansi-font-family: Calibri;">白癜风皮肤病治疗</span><span lang="EN-US"><o:p></o:p></span></p><p class="MsoNormal"><span style="font-family: 宋体; mso-ascii-font-family: Calibri; mso-hansi-font-family: Calibri;"></span></p><p class="MsoNormal"><font face="宋体"> 中科院安徽光学精密<a href="http://machine.oecr.com" target="_blank" class="relatedlink">机械</a>研究所从80年代开始进行准分子激光器的研制。实用化准分子激光器的研制成果曾获中科院科技进步2等奖和3等奖。曾经承担了中科院准分子激光器的攻关课题。目前承担了国家重大科技专项中的半导体制造设备的准分子光源项目。</font><span style="line-height: 1.8em; font-family: 宋体;">安徽光机所是国内最早从事准分子激光器研制的单位之一，也是目前国内唯一一家能够提供准分子激光器<a href="http://b.oecr.com/sell" 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