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type="text/css"></style> <div id="ct" class="ct2 wp cl"> <div class="mn"> <div class="bm_haa cl"> <div class="bm_h cl"> <a href="http://www.oecr.com/portal.php?mod=rss&catid=57" class="y xi2 rss" target="_blank" title="RSS">订阅</a><h1 class="xs2">文章</h1> </div></div> <div class="kjkjb"> <div class="bm vw" style="margin-bottom:0;"> <div class="h hm"> <div class="zxtoux"><img src="http://www.oecr.com/uc_server/avatar.php?uid=12&size=small" /></div> <h1 class="ph">沈阳硅基科技准备SOI晶圆制造 </h1> <p class="xg1"> 时间：2011-3-17 16:06<a class="zz" href="home.php?mod=space&uid=12">作者：这个夏天</a> 阅读<em id="_viewnum">(840)</em> 评论: 0</p> <div class="zxfb" ><a href="http://www.oecr.com/portal.php?mod=rss&catid=57" class="y xi2 rss" target="_blank" title="RSS">订阅</a></div> </div> <!--[diy=diysummarytop]--><div id="diysummarytop" class="area"></div><!--[/diy]--> <div class="s"> <div class="ss"><div><span>导读： </span>MEMS、纳米技术和半导体市场领先的晶圆键合和光刻设备供应商EV Group（EVG）在SEMICON China 2011展会期间宣布，公司新客户沈阳硅基科技有限公司订购了一台EVG850LT自动键合系统用于SOI晶圆制造。</div> </div> <!--[diy=diysummarybottom]--><div id="diysummarybottom" class="area"></div><!--[/diy]--> <div class="d"> <!--[diy=diycontenttop]--><div id="diycontenttop" class="area"></div><!--[/diy]--> <table cellpadding="0" cellspacing="0" class="vwtb"><tr><td id="article_content">MEMS、<a href="http://material.oecr.com" target="_blank" class="relatedlink">纳米</a>技术和<a href="http://sensor.oecr.com" target="_blank" class="relatedlink">半导体</a>市场领先的晶圆键合和光刻设备供应商EV Group（EVG）在SEMICON China 2011展会期间宣布，公司新客户沈阳硅基科技有限公司订购了一台EVG850LT自动键合系统用于SOI晶圆制造。这家中美合资公司将采用EVG850LT来实现SOI晶圆的大规模量产，该设备已在2010年9月出货。 <BR><BR>据沈阳硅基科技有限公司总裁海凤涛介绍，公司选择EVG的晶圆键合设备是由于EVG850设备在吞吐量和良率方面的良好表现。“我们已经开始大规模量产SOI晶圆，对EVG系统印象非常深。EVG是SOI键合设备市场的领导者，采用他们的设备将帮助我们更顺利地将研发成果转为大规模生产，同时确保客户所购买的晶圆是由业界标准的SOI键合系统制造而得。” <BR><BR></td></tr></table> <!--[diy=diycontentbottom]--><div id="diycontentbottom" class="area"></div><!--[/diy]--> <script src="data/cache/home.js?eOg" 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