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type="text/css"></style> <div id="ct" class="ct2 wp cl"> <div class="mn"> <div class="bm_haa cl"> <div class="bm_h cl"> <a href="http://www.oecr.com/portal.php?mod=rss&catid=57" class="y xi2 rss" target="_blank" title="RSS">订阅</a><h1 class="xs2">文章</h1> </div></div> <div class="kjkjb"> <div class="bm vw" style="margin-bottom:0;"> <div class="h hm"> <div class="zxtoux"><img src="http://www.oecr.com/uc_server/avatar.php?uid=54876&size=small" /></div> <h1 class="ph">三星28nm节点恐转投gate-last阵营 </h1> <p class="xg1"> 时间：2010-12-6 14:56<a class="zz" href="home.php?mod=space&uid=54876">作者：update</a> 阅读<em id="_viewnum">(815)</em> 评论: 0</p> <div class="zxfb" ><a href="http://www.oecr.com/portal.php?mod=rss&catid=57" class="y xi2 rss" target="_blank" title="RSS">订阅</a></div> </div> <!--[diy=diysummarytop]--><div id="diysummarytop" class="area"></div><!--[/diy]--> <div class="s"> <div class="ss"><div><span>导读： </span>按原来的计划，身在以IBM为首的”fab club“中的三星公司今年会推出其采用gate-first工艺的high-k金属栅产品，他们将把这种工艺用在32/28nm制程节点上。</div> </div> <!--[diy=diysummarybottom]--><div id="diysummarybottom" class="area"></div><!--[/diy]--> <div class="d"> <!--[diy=diycontenttop]--><div id="diycontenttop" class="area"></div><!--[/diy]--> <table cellpadding="0" cellspacing="0" class="vwtb"><tr><td id="article_content">按原来的计划，身在以IBM为首的”fab club“中的三星公司今年会推出其采用gate-first<a href="http://optics.oecr.com" target="_blank" class="relatedlink">工艺</a>的high-k金属栅<a href="http://b.oecr.com/sell" target="_blank" class="relatedlink">产品</a>，他们将把这种工艺用在32/28nm制程节点上。不过，令人 感到意外的是，在下周即将召开的2010年IEEE国际<a href="http://electronic.oecr.com" target="_blank" class="relatedlink">电子</a>设备大会上，三星准备演讲的文章题目竟然是《gate-last工艺high-k金属栅设 备》。<BR><BR>演讲文章的提要中写道：“我们将介绍一种兼容与Gate last high-k金属栅极的漏源极应力记忆技术(SMT)。沟道应力的模拟方法则采用掩膜版边缘错位模型（mask-edge dislocation model ），应力<a href="http://opticaltest.oecr.com" target="_blank" class="relatedlink">测量</a>方面采用拉曼光谱法。生成SMT时，则采用先对硅基体做低剂量，深度较大的离子注入，使硅基体非晶化（deep pre-amorphization-implant），然后再进行杂质的离子注入的方法，这种方法可以增强沟道的电子迁移率40-60%左右，驱动电流则可提升10%。“”<BR><BR>而就在不久前，三星还曾公开宣称他们计划在今年6月份将high-k工艺引入32nm节点，而且这种技术已经通过了验证，他们还宣称自己是首家拥有通过认证的high-k金属栅极技术的厂家，而这种技术按他们所宣称的内容看，依托的仍是gate-first工艺。<BR><BR>这两个情况结合在一起，人们不免会产生这样的逻辑推理，那就是三星在28nm制程节点很可能会转向gate-last工艺。<BR><BR>如果情况确实如此，那么三星在IBM的”fab club“中的地位就会有一点尴尬了，IBM阵营目前坚守的是gate-first工艺，同在这个联盟中的其它厂家还有 GlobalFoundries, NEC,意法<a href="http://sensor.oecr.com" target="_blank" class="relatedlink">半导体</a>, 东芝等。<BR><BR>比较Intel而言，IBM联盟在发展HKMG工艺方面的时程表已经是大大落后了，Intel早在45nm时代便正式启用了HKMG技术（第一代HKMG为High-k first，gate-last工艺），现在Intel的HKMG已经进化到了32nm节点上的第二代（改为high-K last，gate last）。除了Intel之外，代工巨头台积电最近也表示将在28nm制程节点使用gate last工艺制作HKMG栅极。</td></tr></table> <!--[diy=diycontentbottom]--><div id="diycontentbottom" class="area"></div><!--[/diy]--> <script src="data/cache/home.js?eOg" type="text/javascript"></script> <div id="click_div"><table cellpadding="0" cellspacing="0" class="atd"> <tr><td> <a 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