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type="text/css"></style> <div id="ct" class="ct2 wp cl"> <div class="mn"> <div class="bm_haa cl"> <div class="bm_h cl"> <a href="http://www.oecr.com/portal.php?mod=rss&catid=57" class="y xi2 rss" target="_blank" title="RSS">订阅</a><h1 class="xs2">文章</h1> </div></div> <div class="kjkjb"> <div class="bm vw" style="margin-bottom:0;"> <div class="h hm"> <div class="zxtoux"><img src="http://www.oecr.com/uc_server/avatar.php?uid=95525&size=small" /></div> <h1 class="ph">EUV光刻机价格暴涨 已达近亿美元 </h1> <p class="xg1"> 时间：2010-11-23 09:58<a class="zz" href="home.php?mod=space&uid=95525">作者：dameinv</a> 阅读<em id="_viewnum">(1204)</em> 评论: 0</p> <div class="zxfb" ><a href="http://www.oecr.com/portal.php?mod=rss&catid=57" class="y xi2 rss" target="_blank" title="RSS">订阅</a></div> </div> <!--[diy=diysummarytop]--><div id="diysummarytop" class="area"></div><!--[/diy]--> <div class="s"> <div class="ss"><div><span>导读： </span>多年以前，VLSI Research公司的总裁Risto Puhakka曾经预测称：“EUV光刻系统将乏人问津，其售价有可能提升到1.25亿美元的水平。”</div> </div> <!--[diy=diysummarybottom]--><div id="diysummarybottom" class="area"></div><!--[/diy]--> <div class="d"> <!--[diy=diycontenttop]--><div id="diycontenttop" class="area"></div><!--[/diy]--> <table cellpadding="0" cellspacing="0" class="vwtb"><tr><td id="article_content">年以前，VLSI Research公司的总裁Risto Puhakka曾经预测称：“EUV光刻系统将乏人问津，其售价有可能提升到1.25亿美元的水平。”当时几乎所有的人都认为他是在满嘴跑火车，可是如今，越来越多的厂商开始停止采购这种系统用作生产。<BR><BR> <P><A href="http://www.oecr.com/data/attachment/portal/201011/23/095503c5i35uu2z33rraji.jpg" target=_blank><IMG src="http://www.oecr.com/data/attachment/portal/201011/23/095503c5i35uu2z33rraji.jpg"></A></P>ASML NXE:3100 EUV光刻机<BR><BR>2003年，EUV光刻系统当时的积极支持者Intel公司认为EUV光刻设备的目标定价应在2000万美元较为合适。目前各大<a href="http://sensor.oecr.com" target="_blank" class="relatedlink">半导体</a>厂商普遍采用的是193nm沉浸式光刻系统（光波波长193nm,数据孔径值以ASML公司Twinscan NX1950i为例为1.35），而采用EUV光刻设备（波长13.5nm，数据孔径值以ASML公司ADT EUV Tool和Twinscan NXE3100为例均为0.25）的目的是待193nm沉浸式光刻系统不能满足<a href="http://b.oecr.com/sell" target="_blank" class="relatedlink">产品</a>生产要求时取而代之。<BR><BR> <P><A href="http://www.oecr.com/data/attachment/portal/201011/23/095518eijpijsnjpcsmbmf.jpg" target=_blank><IMG src="http://www.oecr.com/data/attachment/portal/201011/23/095518eijpijsnjpcsmbmf.jpg"></A></P> <P> </P> <P><A href="http://www.oecr.com/data/attachment/portal/201011/23/0955259z6m5uvtw7vkv4fb.jpg" target=_blank><IMG src="http://www.oecr.com/data/attachment/portal/201011/23/0955259z6m5uvtw7vkv4fb.jpg"></A></P> <P>ASML公司的ADT(Alpha demo tool) EUV光刻机<BR><BR>不过，EUV光刻系统的推广普及日程多次延后，与此相对的是，系统的开发研制费用则成指数级增长，由此导致设备的制造成本已经完全失控。举例而言，ASML公司最早的EUV机型--alpha EUV光刻机（采用DPP：Discharge-Produced Plasma光源）的单价据报已经达到了6000万美元的水平，而IMEC和Sematach两家公司则是这种机型的首批两家用户。<BR><BR>尽管如此，EUV系统仍有一线生机。正像以前媒体所报道的那样，ASML公司的EUV光刻机型共取得了六份订单，而上公司初期生产的EUV机型（机型代号NXE:3100，为alpha机型的下一代产品,采用LPP：Laser-Produced Plasma光源）都已经被订购一空，这款机型定于今年年底正式交货。据报道，这款机型的售价高达9000万美元。<BR><BR>另外，据 Barclays Capital市调公司透露，除了初期的NXE:3000机型之外，荷兰ASML公司下一代EUV光刻机产品NXE:3300也取得了10份订单。有分析师分析，这款新机型的订购用户主要有Hynix，IMEC,Intel,三星,东芝以及台积电公司这几家。</P></td></tr></table> <!--[diy=diycontentbottom]--><div id="diycontentbottom" class="area"></div><!--[/diy]--> <script src="data/cache/home.js?eOg" type="text/javascript"></script> <div id="click_div"><table cellpadding="0" cellspacing="0" class="atd"> <tr><td> <a href="http://club.oecr.com/home.php?mod=spacecp&ac=click&op=add&clickid=1&idtype=aid&id=1308&hash=d566a7628d820d3386d6ebcb6ccb3dcc&handlekey=clickhandle" id="click_aid_1308_1" onclick="showWindow(this.id, this.href);doane(event);"> <img src="static/image/click/jidan.gif" alt="" /><br />鸡蛋</a> </td> <td> <a href="http://club.oecr.com/home.php?mod=spacecp&ac=click&op=add&clickid=2&idtype=aid&id=1308&hash=d566a7628d820d3386d6ebcb6ccb3dcc&handlekey=clickhandle" id="click_aid_1308_2" onclick="showWindow(this.id, this.href);doane(event);"> <img src="static/image/click/xianhua.gif" alt="" /><br />鲜花</a> </td> 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