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type="text/css"></style> <div id="ct" class="ct2 wp cl"> <div class="mn"> <div class="bm_haa cl"> <div class="bm_h cl"> <a href="http://www.oecr.com/portal.php?mod=rss&catid=62" class="y xi2 rss" target="_blank" title="RSS">订阅</a><h1 class="xs2">文章</h1> </div></div> <div class="kjkjb"> <div class="bm vw" style="margin-bottom:0;"> <div class="h hm"> <div class="zxtoux"><img src="http://www.oecr.com/uc_server/avatar.php?uid=54876&size=small" /></div> <h1 class="ph">深紫外中光学薄膜的偏振解析计量技术 </h1> <p class="xg1"> 时间：2026-6-12 12:04<a class="zz" href="home.php?mod=space&uid=54876">作者：update</a> 阅读<em id="_viewnum">(10)</em> 评论: <a href="http://www.oecr.com/portal.php?mod=comment&id=10531&idtype=aid" title="查看全部评论"><em id="_commentnum">7</em></a></p> <div class="zxfb" ><a href="http://www.oecr.com/portal.php?mod=rss&catid=62" class="y xi2 rss" target="_blank" title="RSS">订阅</a></div> </div> <!--[diy=diysummarytop]--><div id="diysummarytop" class="area"></div><!--[/diy]--> <div class="s"> <div class="ss"><div><span>导读： </span>深紫外（DUV）领域的可靠计量仍具挑战性，尤其是在需要同时测量精准的 S/P 偏振分离和角度依赖特性时。</div> </div> <!--[diy=diysummarybottom]--><div id="diysummarybottom" class="area"></div><!--[/diy]--> <div class="d"> <!--[diy=diycontenttop]--><div id="diycontenttop" class="area"></div><!--[/diy]--> <table cellpadding="0" cellspacing="0" class="vwtb"><tr><td id="article_content"><p data-path-to-node="2,0"><span data-path-to-node="2,0" data-index-in-node="0"> 深紫外（DUV）领域的可靠计量仍具挑战性，尤其是在需要同时<a href="http://opticaltest.oecr.com" target="_blank" class="relatedlink">测量</a>精准的 S/P 偏振分离和角度依赖特性时。</span></p><p data-path-to-node="2,1"><span data-path-to-node="2,1" data-index-in-node="0"> EssentOptics 为 PHOTON RT 分光光度计开发了全新的测量功能，实现了低至 185 nm 起始波长的光学<a href="http://opticalfilm.oecr.com" target="_blank" class="relatedlink">薄膜</a>高偏振分辨率表征。与传统方法不同，PHOTON RT 平台无需真空腔室或氮气吹扫，即可在低至 185 nm 的波段内提供偏振分辨测量。</span></p><p data-path-to-node="2,0"><span data-path-to-node="2,0" data-index-in-node="0"> 在深紫外（DUV）<a href="http://laser.oecr.com" target="_blank" class="relatedlink">激光</a>器、光刻技术以及检测光学器件中，偏振态和入射角必须受到严格控制，因此准确的 S/P 偏振分离对于表征这些领域中的光学薄膜至关重要。PHOTON RT 仪器能够确保在整个深紫外波段内，对 S 和 P 偏振分量进行清晰、可靠的分离。</span></p><p data-path-to-node="2,0"><span data-path-to-node="2,0" data-index-in-node="0"></span></p><p style="text-align: center;"><a href="data/attachment/portal/202606/12/120519pz2yfjn2bsqp4xgy.png" target="_blank"><img src="data/attachment/portal/202606/12/120519pz2yfjn2bsqp4xgy.png"></a></p><p data-path-to-node="2,1" style="text-align: center;"><span data-path-to-node="2,1" data-index-in-node="0"> 示例：DUV 激光反射镜在 45° 入射角下的 S 偏振和 P 偏振反射率测量</span></p><p data-path-to-node="2,0"><span data-path-to-node="2,0" data-index-in-node="0"> 高测量重复性对于深紫外（Deep UV）光学薄膜的可靠合格认证至关重要。PHOTON RT 仪器能够提供稳定、低噪声的<a href="http://opticaltest.oecr.com" target="_blank" class="relatedlink">测试</a>结果，并具备始终如一的重复性。</span></p><p data-path-to-node="2,0"><span data-path-to-node="2,0" data-index-in-node="0"></span></p><p style="text-align: center;"><a href="data/attachment/portal/202606/12/120519apchsdp03h2sshhg.png" target="_blank"><img src="data/attachment/portal/202606/12/120519apchsdp03h2sshhg.png"></a></p><p data-path-to-node="2,1" style="text-align: center;"><span data-path-to-node="2,1" data-index-in-node="0">示例：在标准设置下连续进行 11 次扫描的测量结果（无平滑处理）</span></p><p data-path-to-node="2,1" style="text-align: center;"><span data-path-to-node="2,1" data-index-in-node="0"><br></span></p><p data-path-to-node="2,0"><span data-path-to-node="2,0" data-index-in-node="0"> 该测量功能的核心亮点：</span></p><ul data-path-to-node="2,1"><li><p data-path-to-node="2,1,0,0"><span data-path-to-node="2,1,0,0" data-index-in-node="0">深紫外波段下探至 185 nm</span></p></li><li><p data-path-to-node="2,1,1,0"><span data-path-to-node="2,1,1,0" data-index-in-node="0">精准的 S 与 P 偏振分离</span></p></li><li><p data-path-to-node="2,1,2,0"><span data-path-to-node="2,1,2,0" data-index-in-node="0">低光谱噪声与高重复性</span></p></li><li><p data-path-to-node="2,1,3,0"><span data-path-to-node="2,1,3,0" data-index-in-node="0">无需真空腔室或氮气吹扫即可进行测量</span></p></li></ul><p data-path-to-node="2,2"><span data-path-to-node="2,2" data-index-in-node="0"> 该功能适用于 PHOTON RT 0217 / 0226 型分光光度计。</span></p><p data-path-to-node="2,1" style="text-align: center;"><span data-path-to-node="2,1" data-index-in-node="0"></span></p><p data-path-to-node="2,3"><span data-path-to-node="2,3" data-index-in-node="0"> 如果您正从事深紫外（Deep UV）光学薄膜的相关工作，欢迎联系我们，了解此功能将如何提升您的测量准确性与可靠性。</span></p><p data-path-to-node="2,3"><span data-path-to-node="2,3" data-index-in-node="0"><br></span></p><p microsoft="" yahei",="" simsun;="" background-color:="" rgb(255,="" 255,="" 255);="" overflow-wrap:="" normal;="" border:="" 0px="" currentcolor;="" line-height:="" 2;="" text-indent:="" 2em;"="" 255);"="" text-align:="" start;="" font-size:="" 14px;"="" style="word-wrap: normal; margin: 0px; padding: 0px 0px 1em; color: rgb(143, 143, 143); background-color: rgb(255, 255, 255); font-family: 微软雅黑; font-size: 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name="comment_anchor_37188"></a> <dl id="comment_37188_li" class="ptm pbm bbda cl"> <dt class="mbm"> <span class="y xw0 xi2"> <a href="javascript:;" onclick="portal_comment_requote(37188, '10531');">引用</a> </span> <a href="http://club.oecr.com/space-uid-85070.html" class="xi2 xw1" c="1">oscarcao</a> <span class="xg1 xw0">2026-6-12 12:04</span> </dt> <dd>1v1飘过</dd> </dl><a name="comment_anchor_37194"></a> <dl id="comment_37194_li" class="ptm pbm bbda cl"> <dt class="mbm"> <span class="y xw0 xi2"> <a href="javascript:;" onclick="portal_comment_requote(37194, '10531');">引用</a> </span> <a href="http://club.oecr.com/space-uid-49012.html" class="xi2 xw1" c="1">nyon163</a> <span class="xg1 xw0">2026-6-12 12:04</span> </dt> <dd>鄙视看了不回的，这么多人看，这么几个回复。</dd> </dl><a name="comment_anchor_37193"></a> <dl id="comment_37193_li" class="ptm pbm bbda cl"> <dt class="mbm"> <span class="y xw0 xi2"> <a href="javascript:;" onclick="portal_comment_requote(37193, '10531');">引用</a> </span> <a href="http://club.oecr.com/space-uid-153213.html" class="xi2 xw1" c="1">vvup</a> <span class="xg1 xw0">2026-6-12 12:04</span> </dt> <dd>众里寻他千百度，蓦然回首在这里！</dd> </dl><a name="comment_anchor_37192"></a> <dl id="comment_37192_li" class="ptm pbm bbda cl"> <dt class="mbm"> <span class="y xw0 xi2"> <a href="javascript:;" onclick="portal_comment_requote(37192, '10531');">引用</a> </span> <a href="http://club.oecr.com/space-uid-68103.html" class="xi2 xw1" c="1">wkf0929</a> <span class="xg1 xw0">2026-6-12 12:04</span> </dt> <dd>我记得好像是2001年开始搞的吧。</dd> </dl><a name="comment_anchor_37191"></a> <dl id="comment_37191_li" class="ptm pbm bbda cl"> <dt class="mbm"> <span class="y xw0 xi2"> <a href="javascript:;" onclick="portal_comment_requote(37191, '10531');">引用</a> </span> <a href="http://club.oecr.com/space-uid-12806.html" class="xi2 xw1" c="1">ikiku</a> <span class="xg1 xw0">2026-6-12 12:04</span> </dt> <dd>可以学到新的光电技术</dd> </dl><a name="comment_anchor_37190"></a> <dl id="comment_37190_li" class="ptm pbm bbda cl"> <dt class="mbm"> <span class="y xw0 xi2"> <a href="javascript:;" onclick="portal_comment_requote(37190, '10531');">引用</a> </span> <a href="http://club.oecr.com/space-uid-69228.html" class="xi2 xw1" c="1">bulesun</a> <span class="xg1 xw0">2026-6-12 12:04</span> </dt> <dd>这也没什么吧。</dd> </dl></div> </div> <!--[diy=diycontentcomment]--><div id="diycontentcomment" class="area"></div><!--[/diy]--> </div> <div class="sd pph"> <div class="drag"> <!--[diy=diyrighttop]--><div id="diyrighttop" class="area"><div id="frameorJGGx" class="sy_ltdr frame move-span cl frame-1"><div class="frame-title title"><span class="titletext">社区成员推荐</span></div><div id="frameorJGGx_left" class="column frame-1-c"><div id="frameorJGGx_left_temp" class="move-span temp"></div><div id="portal_block_930" class="cl_block_bm block move-span"><div id="portal_block_930_content" class="dxb_bc"><div class="module cl ml mls"> <ul><li> <a href="http://club.oecr.com/space-uid-7522.html" c="1" target="_blank"><img 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