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type="text/css"></style> <div id="ct" class="ct2 wp cl"> <div class="mn"> <div class="bm_haa cl"> <div class="bm_h cl"> <a href="http://www.oecr.com/portal.php?mod=rss&catid=57" class="y xi2 rss" target="_blank" title="RSS">订阅</a><h1 class="xs2">文章</h1> </div></div> <div class="kjkjb"> <div class="bm vw" style="margin-bottom:0;"> <div class="h hm"> <div class="zxtoux"><img src="http://www.oecr.com/uc_server/avatar.php?uid=54876&size=small" /></div> <h1 class="ph">中国科学家发明193nm波长紧凑型激光器，或将彻底改变芯片制造和量子设备 </h1> <p class="xg1"> 时间：2025-3-28 08:58<a class="zz" href="home.php?mod=space&uid=54876">作者：update</a> 阅读<em id="_viewnum">(241)</em> 评论: <a href="http://www.oecr.com/portal.php?mod=comment&id=10230&idtype=aid" title="查看全部评论"><em id="_commentnum">5</em></a></p> <div class="zxfb" ><a href="http://www.oecr.com/portal.php?mod=rss&catid=57" class="y xi2 rss" target="_blank" title="RSS">订阅</a></div> </div> <!--[diy=diysummarytop]--><div id="diysummarytop" class="area"></div><!--[/diy]--> <div class="s"> <div class="ss"><div><span>导读： </span>新型固态激光器可产生 193 纳米光，用于精密芯片制造，甚至产生具有轨道角动量的涡旋光束——这是首次可以改变量子技术和制造业的成果。深紫外 (DUV) 激光器发射波长极短的高能光，在半导体制造、高分辨率光谱、精密 ...</div> </div> <!--[diy=diysummarybottom]--><div id="diysummarybottom" class="area"></div><!--[/diy]--> <div class="d"> <!--[diy=diycontenttop]--><div id="diycontenttop" class="area"></div><!--[/diy]--> <table cellpadding="0" cellspacing="0" class="vwtb"><tr><td id="article_content"><div> 新型固态<a href="http://laser.oecr.com" target="_blank" class="relatedlink">激光</a>器可产生193<a href="http://material.oecr.com" target="_blank" class="relatedlink">纳米</a>光，用于精密芯片制造，甚至产生具有轨道角动量的涡旋光束——这是首次可以改变量子技术和制造业的成果。深紫外(DUV)激光器发射波长极短的高能光，在<a href="http://sensor.oecr.com" target="_blank" class="relatedlink">半导体</a>制造、高分辨率光谱、精密<a href="http://material.oecr.com" target="_blank" class="relatedlink">材料</a><a href="http://optics.oecr.com" target="_blank" class="relatedlink">加工</a>和量子技术等领域发挥着重要作用。与传统的准分子或气体放电激光器相比，深紫外激光器具有更好的相干性和更低的功耗，因此可以构建更小、更高效的系统。</div><div><br></div><div><p style="text-align: center;"><a href="data/attachment/portal/202503/28/085813cultnonn9lltzz9n.jpg" target="_blank"><img src="data/attachment/portal/202503/28/085813cultnonn9lltzz9n.jpg"></a></p></div><div style="text-align: center;"><br></div><div style="text-align: center;"> 紧凑型深紫外固体激光器在193nm波长下产生涡旋。图片来源：H.Xuan（中国科学院空天信息研究院大湾区分院）</div><div><br></div><div> 在最近发表在《AdvancedPhotonicsNexus》上的一项研究中，中国科学院的研究人员宣布了一项重大突破：一种紧凑型固态激光系统，可以产生波长为193纳米的相干光。这种特定波长是光刻技术的关键工具，光刻技术用于在硅晶片上蚀刻精细图案，而硅晶片对于制造现代<a href="http://electronic.oecr.com" target="_blank" class="relatedlink">电子</a>设备至关重要。</div><div><br></div><div> 新的激光系统以6kHz的重复率运行，并使用定制的Yb:YAG<a href="http://material.oecr.com" target="_blank" class="relatedlink">晶体</a>放大器产生1030nm的基本激光。该激光分为两条路径：一条通过四次谐波生成转换为258nm光束，输出功率为1.2瓦；另一条为光学参量放大器供电，产生1553nm光束，功率为700毫瓦。然后使用级联三硼酸锂(LBO)晶体将这两束光束组合在一起，产生目标193nm光，平均输出功率为70毫瓦，线宽低于880MHz。</div><div><br></div><div> 研究人员还在混频前将螺旋相位板引入1553纳米光束，从而产生携带轨道角动量的涡旋光束。这是首次从固态激光器产生193纳米涡旋光束。这种光束有望成为混合ArF准分子激光器的种子，并可能在晶圆加工、缺陷检测、量子<a href="http://ofc.oecr.com" target="_blank" class="relatedlink">通信</a>和光学微操作方面有重大应用。</div><div><br></div><div> 这种创新的激光系统不仅提高了半导体光刻的效率和精度，还为先进制造技术开辟了新途径。产生193纳米涡旋光束的能力可能导致该领域的进一步突破，有可能彻底改变电子设备的生产方式。</div><div><br></div><div><p microsoft="" yahei",="" simsun;="" background-color:="" rgb(255,="" 255,="" 255);="" text-align:="" center;"="" 255);"="" center;="" style="word-wrap: normal; margin: 0px; padding: 0px; color: rgb(143, 143, 143); font-family: Tahoma, "Microsoft Yahei", Simsun; background-color: rgb(255, 255, 255); text-align: center;"><a href="http://www.oecr.com/data/attachment/portal/202404/12/093958rszee6k8hhykve3w.jpg" target="_blank" style="word-wrap: normal; color: 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