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type="text/css"></style> <div id="ct" class="ct2 wp cl"> <div class="mn"> <div class="bm_haa cl"> <div class="bm_h cl"> <a href="http://www.oecr.com/portal.php?mod=rss&catid=61" class="y xi2 rss" target="_blank" title="RSS">订阅</a><h1 class="xs2">文章</h1> </div></div> <div class="kjkjb"> <div class="bm vw" style="margin-bottom:0;"> <div class="h hm"> <div class="zxtoux"><img src="http://www.oecr.com/uc_server/avatar.php?uid=54876&size=small" /></div> <h1 class="ph">光电技术百科分享：激光退火技术 </h1> <p class="xg1"> 时间：2016-11-11 10:15<a class="zz" href="home.php?mod=space&uid=54876">作者：update</a> 阅读<em id="_viewnum">(1778)</em> 评论: <a href="http://www.oecr.com/portal.php?mod=comment&id=5044&idtype=aid" title="查看全部评论"><em id="_commentnum">5</em></a></p> <div class="zxfb" ><a href="http://www.oecr.com/portal.php?mod=rss&catid=61" class="y xi2 rss" target="_blank" title="RSS">订阅</a></div> </div> <!--[diy=diysummarytop]--><div id="diysummarytop" class="area"></div><!--[/diy]--> <div class="s"> <div class="ss"><div><span>导读： </span>今天光电工程师社区小编为大家带来的是激光退火技术，这种技术主要用于修复离子注入损伤的半导体材料。</div> </div> <!--[diy=diysummarybottom]--><div id="diysummarybottom" class="area"></div><!--[/diy]--> <div class="d"> <!--[diy=diycontenttop]--><div id="diycontenttop" class="area"></div><!--[/diy]--> <table cellpadding="0" cellspacing="0" class="vwtb"><tr><td id="article_content"> <a href="http://laser.oecr.com" target="_blank" class="relatedlink">激光</a>行业有很多优秀的技术，今天光电工程师<a href="http://club.oecr.com" target="_blank" class="relatedlink">社区</a>小编为大家带来的是激光退火技术，各位光学爱好者可以看看下面的内容，了解一下哦。<div><br><div><p style="text-align: center;"><a href="data/attachment/portal/201611/11/101325qc8xh5zrzhb5ct8q.jpg" target="_blank"><img src="data/attachment/portal/201611/11/101325qc8xh5zrzhb5ct8q.jpg"></a></p></div><div><br></div><div> 激光退火技术主要用于修复离子注入损伤的<a href="http://sensor.oecr.com" target="_blank" class="relatedlink">半导体</a><a href="http://material.oecr.com" target="_blank" class="relatedlink">材料</a>，特别是硅。传统的加热退火技术是把整个晶圆放在真空炉中，在一定的温度（一般是300-1200℃）下退火10-60分钟。这种退火方式并不能完全消除缺陷，高温却导致材料性能下降，掺杂物质析出等问题。于是自上世纪末以来，激光退火的研究非常活跃，研发出了毫秒级脉冲激光退火、纳秒级脉冲激光退火和高频调Q开关脉冲激光退火等多种激光退火方式。近些年来，激光退火已在国内外取得了一些成熟的应用。</div><div><br></div><div><span style="line-height: 1.8em;"><b><font color="#f00000"> 主要优势</font></b></span></div><div><span style="line-height: 1.8em;"><br></span></div><div><span style="line-height: 1.8em;"> (1)加热时间短，能够获得高浓度的掺杂层；</span></div><div><br></div><div> (2)加热局限于局部表层，不会影响周围元件的<a href="http://theory.oecr.com" target="_blank" class="relatedlink">物理</a>性能；</div><div><br></div><div> (3)能够能到半球形的很深的接触区；</div><div><br></div><div> (4)由于激光束可以整形到非常细，为微区薄层退火提供了可能。</div></div><div><br></div><div> 以上就是光电社区跟大家带来的激光退火技术，请对激光感兴趣的朋友们到光电<a href="http://bbs.oecr.com" target="_blank" class="relatedlink">论坛</a>上面发表自己的一些想法哦。</div><div><br></div><div><p style="text-align: center;"><a href="data/attachment/portal/201611/11/101538wz557l0livgiazbk.jpg" target="_blank"><img 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