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type="text/css"></style> <div id="ct" class="ct2 wp cl"> <div class="mn"> <div class="bm_haa cl"> <div class="bm_h cl"> <a href="http://www.oecr.com/portal.php?mod=rss&catid=58" class="y xi2 rss" target="_blank" title="RSS">订阅</a><h1 class="xs2">文章</h1> </div></div> <div class="kjkjb"> <div class="bm vw" style="margin-bottom:0;"> <div class="h hm"> <div class="zxtoux"><img src="http://www.oecr.com/uc_server/avatar.php?uid=54876&size=small" /></div> <h1 class="ph">激光在半导体领域的新应用——激光键合和拆键合 </h1> <p class="xg1"> 时间：2016-11-9 15:41<a class="zz" href="home.php?mod=space&uid=54876">作者：update</a> 阅读<em id="_viewnum">(761)</em> 评论: <a href="http://www.oecr.com/portal.php?mod=comment&id=5033&idtype=aid" title="查看全部评论"><em id="_commentnum">5</em></a></p> <div class="zxfb" ><a href="http://www.oecr.com/portal.php?mod=rss&catid=58" class="y xi2 rss" target="_blank" title="RSS">订阅</a></div> </div> <!--[diy=diysummarytop]--><div id="diysummarytop" class="area"></div><!--[/diy]--> <div class="s"> <div class="ss"><div><span>导读： </span>激光在半导体的领域中有了很多新的应用，这篇文章为大家分享的是激光键合和拆键合的相关知识。</div> </div> <!--[diy=diysummarybottom]--><div id="diysummarybottom" class="area"></div><!--[/diy]--> <div class="d"> <!--[diy=diycontenttop]--><div id="diycontenttop" class="area"></div><!--[/diy]--> <table cellpadding="0" cellspacing="0" class="vwtb"><tr><td id="article_content"> <a href="http://laser.oecr.com" target="_blank" class="relatedlink">激光</a>在很多领域都扮演了重要的角色，相关的一些技术也在不断发展。今天光电工程师<a href="http://club.oecr.com" target="_blank" class="relatedlink">社区</a>为大家分享的是关于激光在<a href="http://sensor.oecr.com" target="_blank" class="relatedlink">半导体</a>领域的新应用——激光键合和拆键合。请有兴趣的朋友们看看下面的内容吧。<div><br><div><p style="text-align: center;"><a href="data/attachment/portal/201611/09/153512rfx50181xr031o1m.jpg" target="_blank"><img src="data/attachment/portal/201611/09/153512rfx50181xr031o1m.jpg"></a></p><p style="text-align: center;"><br></p></div><div><span style="line-height: 1.8em;"> <b><font color="#f00000">共熔键合技术和阳极键合技术</font></b></span></div><div><span style="line-height: 1.8em;"><br></span></div><div><span style="line-height: 1.8em;"> 共熔键合技术已用于多种MEMS器件的制造中，比如说压力<a href="http://sensor.oecr.com" target="_blank" class="relatedlink">传感</a>器、微泵等都需要在衬底上键合<a href="http://machine.oecr.com" target="_blank" class="relatedlink">机械</a>支持结构。硅的熔融键合多用在SOI技术上，如Si-SiO2键合和Si-Si键合，然而该键合方式需要较高的退火温度。阳极键合不需要高温度，但是需要1000-2000V的强电场才能有效的键合，这样的强电场会对晶圆的性能造成影响。于是很多研究者引入了激光辅助键合的键合方式，其原理是将脉冲激光聚焦在键合的界面处，利用短脉冲激光的局部热效应实现局部加热键合。该键合方式具有无需压力、无高温残余应力、无需强电场干扰等诸多优势。</span></div><div><div><br></div><div> 晶圆尺寸逐渐增大厚度减薄，晶圆在流片过程中就容易碎片，于是引入了载体层。将薄晶圆同载体层键合在一起，防止在流片过程中晶圆破损。跟其他拆键合方式相比，激光拆键合可以使用聚酰亚胺作为键和剂，该方式键和可以耐受400℃以上的温度而一般的键合剂在200℃时候就会变性，这就使得一般键合剂在晶圆做高低温循环时就已经无效了。由于激光拆键合技术需要将激光作用于载体和晶圆中间的粘合剂上所以需要载体能够透过相应波长的激光，目前使用较多的激光为紫外激光，载体为玻璃晶圆衬底。激光拆键合技术多用于多种薄硅晶圆的剥离。</div></div></div><div><br></div><div> 看完上面的内容后，大家是不是对激光键合和拆键合有了一定的了解呢？光电<a href="http://bbs.oecr.com" target="_blank" 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