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type="text/css"></style> <div id="ct" class="ct2 wp cl"> <div class="mn"> <div class="bm_haa cl"> <div class="bm_h cl"> <a href="http://www.oecr.com/portal.php?mod=rss&catid=61" class="y xi2 rss" target="_blank" title="RSS">订阅</a><h1 class="xs2">文章</h1> </div></div> <div class="kjkjb"> <div class="bm vw" style="margin-bottom:0;"> <div class="h hm"> <div class="zxtoux"><img src="http://www.oecr.com/uc_server/avatar.php?uid=54876&size=small" /></div> <h1 class="ph">光电技术百科分享：激光微立体光刻(mSL)技术 </h1> <p class="xg1"> 时间：2016-11-8 09:59<a class="zz" href="home.php?mod=space&uid=54876">作者：update</a> 阅读<em id="_viewnum">(2368)</em> 评论: <a href="http://www.oecr.com/portal.php?mod=comment&id=5022&idtype=aid" title="查看全部评论"><em id="_commentnum">5</em></a></p> <div class="zxfb" ><a href="http://www.oecr.com/portal.php?mod=rss&catid=61" class="y xi2 rss" target="_blank" title="RSS">订阅</a></div> </div> <!--[diy=diysummarytop]--><div id="diysummarytop" class="area"></div><!--[/diy]--> <div class="s"> <div class="ss"><div><span>导读： </span>今天的技术百科跟大家整理了一些关于激光微立体光刻(mSL)技术的相关知识，激光微立体光刻(mSL)技术是立体光刻(SLA)工艺这一先进的快速成型技术应用到微制造领域中衍生出来的一种加工技术。</div> </div> <!--[diy=diysummarybottom]--><div id="diysummarybottom" class="area"></div><!--[/diy]--> <div class="d"> <!--[diy=diycontenttop]--><div id="diycontenttop" class="area"></div><!--[/diy]--> <table cellpadding="0" cellspacing="0" class="vwtb"><tr><td id="article_content"><div><div> <a href="http://laser.oecr.com" target="_blank" class="relatedlink">激光</a>微立体光刻(mSL)技术是微<a href="http://optics.oecr.com" target="_blank" class="relatedlink">加工</a>技术中的一种，<span style="line-height: 25.2px;">激光微加工技术</span><span style="line-height: 1.8em;">的特点是“直写”加工，简化了<a href="http://optics.oecr.com" target="_blank" class="relatedlink">工艺</a>，实现了微型<a href="http://machine.oecr.com" target="_blank" class="relatedlink">机械</a>的快速成型制造。今天光电工程师<a href="http://club.oecr.com" target="_blank" class="relatedlink">社区</a>给大家整理了一些关于</span><span style="line-height: 25.2px;">激光微立体光刻(mSL)技术的相关知识，有兴趣的光电爱好者们可以看看。</span></div><div><span style="line-height: 25.2px;"><br></span></div><div><p style="text-align: center;"><a href="data/attachment/portal/201611/08/095128f1iikbxdg3fnndse.jpg" target="_blank"><img src="data/attachment/portal/201611/08/095128f1iikbxdg3fnndse.jpg"></a></p></div><div><br></div><div> <font color="#f00000"><b>什么是激光微立体光刻(mSL)技术</b></font></div><div><br></div><div> 这是立体光刻(SLA)工艺这一先进的快速成型技术应用到微制造领域中衍生出来的一种加工技术，之所以称为微立体光刻(Microstere-olithography 或mSL)，是因为<span style="line-height: 25.2px;">加工的高精度与微型化。</span><span style="line-height: 1.8em;">同其他微加工技术相比，微立体光刻技术最大的特点是不受微型器件或系统结构形状的限制，可以加工包含自由曲面在内的任意三维结构，并且可以将不同的微部件一次成型，省去微装配环节，此外该技术还有加工时间短、成本低、加工过程自动化等优点，为微机械批量化生产创造了有利条件。</span></div><div><br></div><div><b style="line-height: 25.2px; color: rgb(240, 0, 0);"> </b><font color="#f00000"><b><span style="line-height: 25.2px;">激光微立体光刻(mSL)技术的</span><span style="line-height: 25.2px;">局限性</span></b></font></div><div><br></div><div> 主要包括两方面：</div><div><br></div><div> 一： 精度较低，目前基于快速成型的微加工技术的最高水平方向的精度在1mm 左右，而垂直方向大约为3mm，显然这一精度无法同基于集成<a href="http://electronic.oecr.com" target="_blank" class="relatedlink">电路</a>的硅微加工工艺相比。</div><div><br></div><div> 二：使用<a href="http://material.oecr.com" target="_blank" class="relatedlink">材料</a>受到一定的限制，目前的树脂材料在电性能、机械性能、热性能方面与硅材料相比有一定差距。近年来，激光微立体光刻技术得到了大力研究与开发。</div><div><br></div><div> <b><font color="#f00000"> 提高</font></b><b style="line-height: 25.2px;"><font color="#f00000">效率和</font></b><b style="line-height: 1.8em;"><font color="#f00000">精度方面的发展方向</font></b></div><div><br></div><div> 1，在材料方面，研究开发出更高分辨率的光固化树脂，如已研制出的双光近红外光聚合树脂为高精度制造奠定了良好基础；</div><div><br></div><div> 2，在工艺方面，研究开发无需任何支撑结构或牺牲层的工艺以及与平面微加工工艺的集成，从而进一步简化工艺，提高加工精度与生产柔性。</div></div><div><br></div><div><span style="line-height: 25.2px;"> 3，</span><span style="line-height: 25.2px;">以面曝光代替点曝光，从而进一步缩短加工时间，提高生产效率；</span></div><div><span style="line-height: 25.2px;"><br></span></div><div><span style="line-height: 25.2px;"> 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