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type="text/css"></style> <div id="ct" class="ct2 wp cl"> <div class="mn"> <div class="bm_haa cl"> <div class="bm_h cl"> <a href="http://www.oecr.com/portal.php?mod=rss&catid=58" class="y xi2 rss" target="_blank" title="RSS">订阅</a><h1 class="xs2">文章</h1> </div></div> <div class="kjkjb"> <div class="bm vw" style="margin-bottom:0;"> <div class="h hm"> <div class="zxtoux"><img src="http://www.oecr.com/uc_server/avatar.php?uid=54876&size=small" /></div> <h1 class="ph">中科院发明了适合MEMS传感器集成封装的新方法 </h1> <p class="xg1"> 时间：2016-1-4 13:23<a class="zz" href="home.php?mod=space&uid=54876">作者：update</a> 阅读<em id="_viewnum">(4498)</em> 评论: <a href="http://www.oecr.com/portal.php?mod=comment&id=3841&idtype=aid" title="查看全部评论"><em id="_commentnum">5</em></a></p> <div class="zxfb" ><a href="http://www.oecr.com/portal.php?mod=rss&catid=58" class="y xi2 rss" target="_blank" title="RSS">订阅</a></div> </div> <!--[diy=diysummarytop]--><div id="diysummarytop" class="area"></div><!--[/diy]--> <div class="s"> <div class="ss"><div><span>导读： </span>中国科学院地质与地球物理研究所工程师发明了一种适合MEMS尤其是MEMS惯性传感器的集成封装方法，该方法多方面解决了MEMS加速度传感器温度系数大、温度滞回大等难题，并且降低了生产成本。</div> </div> <!--[diy=diysummarybottom]--><div id="diysummarybottom" class="area"></div><!--[/diy]--> <div class="d"> <!--[diy=diycontenttop]--><div id="diycontenttop" class="area"></div><!--[/diy]--> <table cellpadding="0" cellspacing="0" class="vwtb"><tr><td id="article_content"><font face="宋体" size="3"> </font><p style="margin: 0cm 0cm 0pt;"><br></p><span style='font-family: "微软雅黑","sans-serif"; font-size: 12pt;'><p align="center" style="margin: 0cm 0cm 0pt;"><font face="宋体"> <a class="opattach" href="javascript:;"><img width="322" height="220" class="cur1" style="width: 454px; height: 308px;" onclick="insertImage('data/attachment/portal/201601/04/133135kunzelhxvktaeaux.jpg');" src="http://www.oecr.com/data/attachment/portal/201601/04/133135kunzelhxvktaeaux.jpg.thumb.jpg"> </a></font></p><p style="margin: 0cm 0cm 0pt; text-indent: 25.5pt;"><span lang="EN-US" style='font-family: "微软雅黑","sans-serif"; font-size: 12pt;'>MEMS</span><span style='font-family: "微软雅黑","sans-serif"; font-size: 12pt;'>即微<a href="http://machine.oecr.com" target="_blank" class="relatedlink">机电</a>系统（<span lang="EN-US">Microelectro Mechanical Systems</span>），<span lang="EN-US">MEMS</span><a href="http://sensor.oecr.com" target="_blank" class="relatedlink">传感</a>器是采用微<a href="http://electronic.oecr.com" target="_blank" class="relatedlink">电子</a>和微<a href="http://machine.oecr.com" target="_blank" class="relatedlink">机械</a><a href="http://optics.oecr.com" target="_blank" class="relatedlink">加工</a>技术制造出来的新型传感器。与传统的传感器相比，它具有体积小、重量轻、成本低、功耗低、可靠性高、适于批量化生产、易于集成和实现智能化的特点。同时，在微米量级的特征尺寸使得它可以完成某些传统机械传感器所不能实现的功能。但目前，电子元器件芯片朝着越来越复杂的方向发展，而传统的<span lang="EN-US">IC</span>集成器件封装和金属管壳封装都会带来困难。<span lang="EN-US">MEMS</span>传感器，为了提高其性能，往往需要增加可动质量块的厚度，使用传统的<span lang="EN-US">IC</span>集成器件封装技术和国内外标准的<span lang="EN-US">LCC</span>（无引脚芯片载体）封装管壳的腔体深度往往不能满足<span lang="EN-US">MEMS</span>厚度的要求，极大地造成了封装及微组装工序的复杂度，而且芯片的整体面积很大，增加了成本，不利于进行批量生产。</span></p><p style="margin: 0cm 0cm 0pt;"><font face="宋体"> <br></font></p><p style="margin: 0cm 0cm 0pt; text-indent: 24pt;"><span style='font-family: "微软雅黑","sans-serif"; font-size: 12pt;'>日前，中国科学院地质与地球<a href="http://theory.oecr.com" target="_blank" class="relatedlink">物理</a>研究所工程师发明了一种适合<span lang="EN-US">MEMS</span>尤其是<span lang="EN-US">MEMS</span>惯性传感器的集成封装方法，该方法多方面解决了<span lang="EN-US">MEMS</span>加速度传感器温度系数大、温度滞回大等难题，并且降低了生产成本。</span></p><p style="margin: 0cm 0cm 0pt;"><font face="宋体"> <br></font></p><p style="margin: 0cm 0cm 0pt;"><span style='font-family: "微软雅黑","sans-serif"; font-size: 12pt;'> 中国科学院地质与地球物理研究所工程师薛旭等人以梳齿型<span lang="EN-US">MEMS</span>加速度计为典型实施例，发明了一种适合<span lang="EN-US">MEMS</span>尤其是<span lang="EN-US">MEMS</span>惯性传感器的集成封装方法，并于近日获得国家发明专利授权（专利名称：一种<span lang="EN-US">MEMS</span>传感器封装结构及其封装方法；发明人：薛旭，郭士超；专利号：<span lang="EN-US">ZL201410183524.9</span>）。他们针对现有技术的不足，提供了一种根据需要可方便拓展为多层级结构的基座，并可将导线分层布设于基座中，可解决走线困难的问题。此外，他们还提供了一种低封装应力和气密性较好的封装结构，采取低温平行缝焊的低温度封装技术。<span lang="EN-US">MEMS</span>与基座的粘接<a href="http://optics.oecr.com" target="_blank" class="relatedlink">工艺</a>与<a href="http://material.oecr.com" target="_blank" class="relatedlink">材料</a>匹配以及温度传感器和<span lang="EN-US">MCU</span>处理器有效布置，从材料应力、算法补偿、实时温度校准等多方面解决了<span lang="EN-US">MEMS</span>惯性传感器尤其是<span lang="EN-US">MEMS</span>加速度传感器的温度系数大、温度滞回大等难题，提高了生产效率，降低了成本。</span></p><p style="margin: 0cm 0cm 0pt;"><font face="宋体"> <br></font></p><p style="margin: 0cm 0cm 0pt; text-indent: 25.5pt;"><span style='font-family: "微软雅黑","sans-serif"; font-size: 12pt;'>该发明从偏置稳定性、温度特性以及工程化等几个方面解决了一系列<span lang="EN-US">MEMS</span>难题，相关技术已经在课题组的样机和<a href="http://b.oecr.com/sell" target="_blank" class="relatedlink">产品</a>上进行了小批量试制，取得了较好的效果，初步达到了工程化及量产能力，具有一定的推广应用前景。</span></p><p style="margin: 0cm 0cm 0pt;"><font face="宋体"> </font></p></span><p style="margin: 0cm 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