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type="text/css"></style> <div id="ct" class="ct2 wp cl"> <div class="mn"> <div class="bm_haa cl"> <div class="bm_h cl"> <a href="http://www.oecr.com/portal.php?mod=rss&catid=58" class="y xi2 rss" target="_blank" title="RSS">订阅</a><h1 class="xs2">文章</h1> </div></div> <div class="kjkjb"> <div class="bm vw" style="margin-bottom:0;"> <div class="h hm"> <div class="zxtoux"><img src="http://www.oecr.com/uc_server/avatar.php?uid=54876&size=small" /></div> <h1 class="ph">IBM以石墨烯制成混频器IC </h1> <p class="xg1"> 时间：2011-7-14 08:49<a class="zz" href="home.php?mod=space&uid=54876">作者：update</a> 阅读<em id="_viewnum">(2735)</em> 评论: 0</p> <div class="zxfb" ><a href="http://www.oecr.com/portal.php?mod=rss&catid=58" class="y xi2 rss" target="_blank" title="RSS">订阅</a></div> </div> <!--[diy=diysummarytop]--><div id="diysummarytop" class="area"></div><!--[/diy]--> <div class="s"> <div class="ss"><div><span>导读： </span>美国IBM公司利用以石墨烯作通道的晶体管（GFET）等制成了混频器IC。从GFET的形成、层叠到电感器和布线的集成，均在晶圆上一次性制成，首次展现了采用石墨烯的IC量产的可能性。</div> </div> <!--[diy=diysummarybottom]--><div id="diysummarybottom" class="area"></div><!--[/diy]--> <div class="d"> <!--[diy=diycontenttop]--><div id="diycontenttop" class="area"></div><!--[/diy]--> <table cellpadding="0" cellspacing="0" class="vwtb"><tr><td id="article_content">美国IBM公司利用以石墨烯作通道的<a href="http://material.oecr.com" target="_blank" class="relatedlink">晶体</a>管（GFET）等制成了混频器IC。从GFET的形成、层叠到电感器和布线的集成，均在晶圆上一次性制成，首次展现了采用石墨烯的IC量产的可能性。 <BR><BR>此次制成的混频器IC因尺寸非常小，<a href="http://display.oecr.com" target="_blank" class="relatedlink">显示</a>出了其特性温度依存性小，而且可在10GHz的大带宽工作等出色性能。IBM称今后的目标是将GFET混载于更复杂的<a href="http://electronic.oecr.com" target="_blank" class="relatedlink">电路</a>中。 <BR><BR>在SiC基板上外延生长 <BR><BR> <P><A href="http://www.oecr.com/data/attachment/portal/201107/14/084755g6xtcn4hxz036zvt.jpg" target=_blank></A></P> <P>混频器是无线<a href="http://ofc.oecr.com" target="_blank" class="relatedlink">通信</a>中用于调制频率的电路。此次的混频器IC由1个栅极长为550nm的GFET、2个电感器以及4个端子焊盘等组成。试制芯片的尺寸约为900μm×600μm。 <BR><BR>试制时，首先用热分解法令石墨烯膜在SiC基板上外延生长。具体为，把SiC基板的表面加热至1400℃，只令Si从表面2～3层的SiC结晶中脱离出来。剩下的C会自动形成石墨烯膜。该石墨烯膜显示出n型<a href="http://sensor.oecr.com" target="_blank" class="relatedlink">半导体</a>的特性。 </P> <P><A href="http://www.oecr.com/data/attachment/portal/201107/14/084755g6xtcn4hxz036zvt.jpg" target=_blank><IMG src="http://www.oecr.com/data/attachment/portal/201107/14/084755g6xtcn4hxz036zvt.jpg"></A></P> <P>GFET和电感器混载于一枚芯片上</P> <P> 图中展示了IBM开发的混频器IC。在利用热分解法形成石墨烯后，依次制作布线层的源漏电极、栅极电极及电感器。栅极长为550nm，通道宽度为30μm。<BR><BR>在该石墨烯膜上制作掩模，使用基于<a href="http://electronic.oecr.com" target="_blank" class="relatedlink">电子</a>光束（EB）的光刻技术在石墨烯膜上形成图案。然后，层叠源漏电极。在形成作为栅极绝缘膜的Al2O3后，形成栅极电极。接着通过使用垫片叠加Al层，以EB<a href="http://optics.oecr.com" target="_blank" class="relatedlink">加工</a>成电感器。 <BR><BR>在评价此次的试制品时，确认了其可按照设计工作。即输入4GHz的局部振荡（LO）频率和3.8GHz的模拟信号时，输出了这两种频率的和7.8GHz及差200MHz。 <BR><BR>此次混频器IC使用了高价的SiC基板，这是其实用化所面临的主要课题。不过，与使用GaAs、工作频率为几GHz的混频器IC<a href="http://b.oecr.com/sell" target="_blank" class="relatedlink">产品</a>相比，还是有其优势的。因为现有混频器IC无法混载电感器，需要外置被动部件。（记者：野泽 哲生） </P> <DIV><FONT color="#808080" size=2><IMG src="http://www.oecr.com/xwb/images/bgimg/icon_logo.png"> 已同步至 <a href="http://ome.ac.cn/index.php?m=show&id=14378085223" target="_blank">update的微博</A></FONT></DIV></td></tr></table> <!--[diy=diycontentbottom]--><div id="diycontentbottom" class="area"></div><!--[/diy]--> <script src="data/cache/home.js?eOg" type="text/javascript"></script> <div id="click_div"><table cellpadding="0" cellspacing="0" class="atd"> <tr><td> <a href="http://club.oecr.com/home.php?mod=spacecp&ac=click&op=add&clickid=1&idtype=aid&id=2200&hash=af0b08fdb1a86ff5008c51e62b6999fa&handlekey=clickhandle" id="click_aid_2200_1" onclick="showWindow(this.id, this.href);doane(event);"> <img src="static/image/click/jidan.gif" alt="" /><br />鸡蛋</a> </td> <td> <a 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