有谁了解光驰镀膜机的光控系统？
LBSALE[80]LBSALE[这个贴子最后由wazxq在 2003/06/18 01:26pm 第 1 次编辑]
对不起最近买东西太多，要买点钱！ 呵呵
2. Settings of Control Type
A group of coating control types is defined for users to control coating process:
1 Optical
Characteristic: Automatic.
When using Optical control type, the coating soft will control the coating time according
to the optical light value curve. If the expecting peak position is reached, coating process
for the current layer is to be finished.
Notice: When greater than 9, layers with control type Optical will automatically be
under a restriction of thickness limitation whose value is presently 10%.
Attention: after restart after any stop in the middle of layer coating previously set to
control type Optical, user’s manual stop is necessary. And it is a basic rule
for coating operator to monitor/control coating process of the specific layer
after resuming from stop.
2 ManualStop
Characteristic: For user.
Attention: Selecting ManualStop control type means that when to stop current layer’s
coating is determined by user himself. Accordingly it is actually a type of user control.
This control gives users a choice of manually controlling coating process.
3 TimeS
Characteristic: Space layer (multiple peaks), automatic
This type is for automatic space layer control.
Included in the coating software is an algorithm for determining when it is appropriate to
stop the space layer. The algorithm will calculate the currently passed peak number, and
decide when it is time for stopping the current space layer.
Attention: after restart after any stop in the middle of space layer coating using control
type TimeS, user’s manual stop is necessary.
© Optorun 1999-2002
4 OpticalS
Characteristic: Automatic and for space layer.
OpticalS is designed for automatic control of space (multi-peak) layers.
You can choose to use this method for space layers when optical signals are not strong
enough.
Compared with TimeS, which is also for space layers, OpticalS takes optical signals as
primary factor for control.
Attention: Choose to use this method according to pragmatic results.
5 Thickness Control Types
Thickness controls types include such control methods:
ThicknessH, ThicknessL, ThicknessS, and Thickness – average thickness of
specified layers
Among of these methods, ThicknessH and ThicknessL are average thickness of all
previous layers. ThicknessS is the average λ/4 thickness of the latest space layer.
As for Thickness, it is more versatile and allows users to use average thickness of
specified layers. Please refer to 3. Thickness Control Types in Detail for more
information.
Thickness Control Types in Detail
1 ThicknessH, ThicknessL and ThicknessS
(I) ThicknessH
Characteristic: Thickness
‘ThicknessH’ indicates the average thickness of previous layers of type HI. When
selecting this control type, the coating process for the layer will automatically finish
when deposition reaches this thickness.
Notice: thicknessH control can be used only after the 8th layer and when the thickness
for HI is correctly calculated.
Notice: During the process of coating, pause or stop or especially CLEAR(ZERO) the
counter of deposition controller(IC/5 or so) might result in incorrect thickness of the
related layer, and accordingly might result in incorrect thickness averaging. In such case
please manually set the thickness to its originally correct value (refer to 5.4 for correct
operation).
(II) ThicknessL
Characteristic: Thickness
‘ThicknessL’ indicates the average thickness of previous layers of type LO. When
selecting this control type, the coating process for the layer will automatically finish
when deposition thickness reaches this thickness.
Notice: ThicknessL control can be used only after the 8th layer and when the thickness
for LO is correctly calculated.
Notice: During the process of coating, pause or stop or especially CLEAR(ZERO) the
counter of deposition controller(IC/5 or so) might result in incorrect thickness of the
related layer, and accordingly might result in incorrect thickness averaging. In such case
please manually set the thickness to its originally correct value (refer to 5.4 for correct
operation).
(III) ThicknessS
Characteristic: Thickness
© Optorun 1999-2002
‘ThicknessS’ indicates the average thickness between two peaks of the latest(most recent)
space layer. When selecting this control type, the coating process for the layer will
automatically finish when deposition thickness reaches this thickness.
Notice: ThicknessS control can be used only when space layer’s thickness is correctly
calculated. When space layer is coated as a starting layer, ThicknessS can not be
accurately calculated, and ThicknessS accordingly can not be used.
Notice: During the process of coating, pause or stop or especially CLEAR(ZERO) the
counter of deposition controller(IC/5 or so) might result in incorrect thickness of the
related layer, and accordingly might result in incorrect thickness averaging. In such case
please manually set the thickness to its originally correct value (refer to 5.4 for correct
operation).
2 Thickness Control Type Specified by User
ThicknessH and ThicknessL are average thickness values of all the (HI or LO) layers passed
up until current layer. This means all related layers are taken into account to calculate the
average thickness. However during coating process proceeds, layer thickness’ are changing as
layers go by. In some cases averaging thickness of recent layers or some certain layers is more
useful, which seems to more accurately reflect the most recent coating status. Accordingly
more versatile Thickness Control Types are necessary.
The Thickness Control Types described here are intended for calculating thickness most
agreeable to coater’s requirement.
3.1.2.1 Definition
Tab. 1
Name Meaning
ThicknessH Average thickness of all the previous “HI”(Ta2O5) layers
ThicknessL Average thickness of all the previous “LO”(SiO2) layers
ThicknessH@n Average thickness of the latest previous n “HI” (Ta2O5) layers
ThicknessL@n Average thickness of the latest previous n “LO” (SiO2) layers
ThicknessH@n1-n2 Average thickness of the “HI” (Ta2O5) layers between layer n1
and n2
ThicknessL@n1-n2 Average thickness of the “LO” (SiO2) layers between layer n1
and n2
Thickness@n1,n2,…,ni Average thickness of the layer n1, n2, n3, … and ni
