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onclick="this.select();setCopy(this.value, '链接已经复制到剪贴板');" value="http://www.oecr.com/plugin.php?id=attachcenter:page&aid=88251" size="50" /></p> </div> <div class="bm"> <div class="bm_c xld"> <b>离子镀膜技术的进展:</b><div class="postmsg">离子镀膜技术的进展<br /> Progress of ion plating technology<br /> 下载全文<br /> <br /> 作 者：王福贞 刘欢 那日松<br /> WANG Fu-zhen, LIU Huan, NA Ri-song （Vice-Dean of the Mechatronice College, Beijing Union University, Beijing 100020, China）<br /> 机构地区：北京联合大学机电学院,北京100020<br /> 出 处：《真空》 2014年第51卷第5期 1-8页,共8页<br /> Vacuum<br /> 摘 要：本文概括地介绍了五十年来离子镀膜技术的发展概况,介绍了离子镀膜技术的意义、原理、特点、发展和应用范围。从D.M.Mattox发明离子镀膜技术以来的五十年中,离子镀膜技术适应高端产品加工和高新技术发展的要求,得到了飞速发展。各种激励气体放电过程技术,提高等离子体密度的措施层出不穷,满足各种需要的新的薄膜材料在各个应用领域得到了广泛的应用。对国防事业、宇航事业、高新技术产品和美化人民生活做出了突出贡献。我们期待离子镀膜技术继往开来,在新的五十年中再放光彩。<br /> This paper introduced the progress, characteristics, application scope and meaning of the ion plating technology. In the past fifty years ion plating technology conformed to the requirements of high-end products processing and Hi-Tech development, and got rapid development. The emergence of incentive gas discharge technology and the measures to improve the density of plasma met the need in various fields of the thin films. These technology made contribution to national defense, space undertaking, high-tech products and civilian industry products.<br /> 关键词：离子镀膜技术 固态物质源离子镀膜技术 气态物质源离子镀膜技术 激励气体放电技术<br /> ion plating technology ; solid material source ; gaseous material source ; incentive gas dischargetechnology ;</div> <div style="height200px;"></div> </div> </div> </div> </div></div> </div> <!--autocomment filter by maxnum--> <div class="ft_wp"> <div id="ft" class=" cl"> <div id="flk" > <p> <a href="http://wpa.qq.com/msgrd?V=3&Uin=20600600&Site=光电工程师社区&Menu=yes&from=discuz" target="_blank" title="QQ"><img src="static/image/common/site_qq.jpg" alt="QQ" /></a><span class="pipe">|</span><a href="http://m.oecr.com" >手机版</a><span class="pipe">|</span><a href="http://so.oecr.com" title="站内搜索" target="_blank" >搜索</a><span class="pipe">|</span><a href="http://www.focaloptics.com" title="主办单位：武汉焦点光学技术有限公司" target="_blank" >焦点光学</a><span class="pipe">|</span><a href="http://www.oecr.com" target="_blank">光电工程师社区</a> ( <a href="http://beian.miit.gov.cn/" target="_blank">鄂ICP备17021725号-1</a> <a href="http://www.beian.gov.cn/portal/registerSystemInfo?recordcode=42011102000821" target="_blank">鄂网安备42011102000821号</a> ) <span id="tcss"></span><script type="text/javascript" src="http://tcss.qq.com/ping.js?v=1eOg" charset="utf-8"></script><script type="text/javascript" reload="1">pgvMain({"discuzParams":{"r2":"1028778","ui":0,"rt":"plugin","pn":1,"qq":"000"},"extraParams":""});</script></p> <p class="xs0"> <span id="debuginfo"> Copyright 2015 光电工程师社区 版权所有 All Rights Reserved. </span> </p> </div> <div id="ftl" > <p>申明：本站为非盈利性公益个人网站，已关闭注册功能，本站所有内容均为网络收集整理，不代表本站立场。如您对某些内容有质疑或不快，请及时联系我们处理！ </p> </div> <div id="frt" > <div class="wp"> <p class="dd01"> © 2001-2022 <a href="http://www.oecr.com" target="_blank">光电工程师社区</a> 网站备案号：<a href="https://beian.miit.gov.cn/">鄂ICP备17021725号</a> 网站公安备案号：<a href="http://www.beian.gov.cn/portal/registerSystemInfo?recordcode=42011102000821">鄂42011102000821号</a> Powered by <a href="http://www.discuz.net" target="_blank">Discuz!</a> <em>X3.2</em> </p><p class="dd02">GMT+8, 2025-12-17 06:04 </p> </div> </div></div> </div> </div> <!--bottombg结束--> <script src="home.php?mod=misc&ac=sendmail&rand=1765922642" type="text/javascript"></script> <!--<div id="scrolltop"> <span hidefocus="true"><a title="返回顶部" onclick="window.scrollTo('0','0')" class="scrolltopa" ><b>返回顶部</b></a></span> </div> --> <div id="scrolltop"> <span hidefocus="true"><a title="返回顶部" onclick="window.scrollTo('0','0')" class="scrolltopa" ><b>返回顶部</b></a></span> </div> <script type="text/javascript">_attachEvent(window, 'scroll', function () { showTopLink(); });checkBlind();</script> <div id="discuz_tips" style="display:none;"></div> <script type="text/javascript"> var tipsinfo = '1028778|X3.2|0.6||0||0|7|1765922642|b91dc9c1ef5c11927763853d2ca22449|2'; </script> <script src="http://discuz.gtimg.cn/cloud/scripts/discuz_tips.js?v=1" type="text/javascript" charset="UTF-8"></script></body></html>