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onclick="this.select();setCopy(this.value, '链接已经复制到剪贴板');" value="http://www.oecr.com/plugin.php?id=attachcenter:page&aid=88248" size="50" /></p> </div> <div class="bm"> <div class="bm_c xld"> <b>硬质涂层用镀膜靶材的研究:</b><div class="postmsg">硬质涂层用镀膜靶材的研究<br /> RESEARCH ON TARGETS USED IN HARD COATINGS<br /> 下载全文<br /> <br /> 作 者：梁俊才[1,2,3] 穆健刚[1,2] 张凤戈[1,2,3] 周武平[1,2,3] 赵海波[4]<br /> LIANG Jun-cai,MU Jian-gang,ZHANG Feng-ge,ZHOU Wu-ping,ZHAO Hai-bo（ 1.Contral Iron ＆ Steel Research Institute,Beijing 100081,China;2.Advanced Technology ＆ Materials Co., Ltd, Beijing 100081, China;3.Beijing Key Laboratory of Coating Targets, Beijing, Beijing 100081, China; 4.The Analysis and Testing Centre, Sichuan University, Chengdu 610064, China）<br /> 机构地区：[1]钢铁研究总院,北京100081 [2]安泰科技股份有限公司,北京100081 [3]北京市镀膜靶材重点实验室,北京100081 [4]四川大学分析测试中心,成都610064<br /> 出 处：《粉末冶金工业》 2014年第24卷第2期 38-43页,共6页<br /> Powder Metallurgy Industry<br /> 基 金：国家自然科学基金资助项目（51275323）<br /> 摘 要：镀膜靶材作为物理气相沉积方法制备薄膜的沉积源材料,广泛应用于机械加工、半导体集成电路、磁记录和平面显示等产业中.在机械加工产业中,硬质涂层提高了部件的机械加工效率、延长了部件的使用寿命,具有很高的经济效益.物理气相沉积过程中,镀膜靶材以溅射或弧蒸发的方式制备硬质涂层,其质量好坏将直接影响硬质涂层的物理及力学性能,是涂层技术的重要组成部分.本文对用于制备硬质涂层镀膜靶材的种类、技术要求、制备方法和研究现状做了概述.<br /> Coating target materials,as raw materials of films made by physical vapor deposition,are widely used in machining processing,semiconductor integrated circuit,magnetic recording and flat pannel display industry,etc.In machining processing industry,hard coatings can increase the efficiency of the machining processing,extend the service life of components and have a very high economic benefit.In the process of physical vapor deposition,coating target materials are used in preparation of the hard coatings with the way of sputtering or arc evaporation,which quality directly affects the physical and mechanical properties of the hard coatings,The species,technical requirements,preparation methods and development direction of the sputtering target materials used in hard coatings were introduced in this paper.<br /> 关键词：硬质涂层 靶材 溅射 弧蒸发<br /> hard coatings ; target materials ; sputtering ; arc evaporation ;</div> <div style="height200px;"></div> </div> </div> </div> </div></div> </div> <!--autocomment filter by maxnum--> <div class="ft_wp"> <div id="ft" class=" cl"> <div id="flk" > <p> <a href="http://wpa.qq.com/msgrd?V=3&Uin=20600600&Site=光电工程师社区&Menu=yes&from=discuz" target="_blank" title="QQ"><img src="static/image/common/site_qq.jpg" alt="QQ" /></a><span class="pipe">|</span><a href="http://m.oecr.com" >手机版</a><span class="pipe">|</span><a href="http://so.oecr.com" title="站内搜索" target="_blank" >搜索</a><span class="pipe">|</span><a href="http://www.focaloptics.com" title="主办单位：武汉焦点光学技术有限公司" target="_blank" >焦点光学</a><span class="pipe">|</span><a href="http://www.oecr.com" target="_blank">光电工程师社区</a> ( <a href="http://beian.miit.gov.cn/" target="_blank">鄂ICP备17021725号-1</a> <a href="http://www.beian.gov.cn/portal/registerSystemInfo?recordcode=42011102000821" 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